Optical circuit in which fabrication is easy
In a method for fabricating an optical circuit, a mirror element with a protection film formed within a die of a semiconductor is connected to a substrate at a predetermined position. The mirror element with the protection film connected to the substrate is peeled from the die of the semiconductor. The protection film is removed to expose a reflection surface of a reflection film of the mirror element.
1. A mirror comprising a multi-layer thin film, wherein said multi-layer thin film comprises a first layer and a second layer,
said first layer has a reflection surface plane,
said second layer has a contact plane with a substrate,
an angle between said reflection surface plane and said contact plane is 45° or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, and
said mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material,
wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin.
2. The mirror according to claim 1 , wherein said active energy line reaction resin is one of phenol novolak type epoxy resin, cresol/volak type epoxy resin, glycylamine type epoxy resin and biphenyl type epoxy resin.
3. A mirror comprising a gold layer, wherein said gold layer has a reflection surface plane and a contact plane,
an angle between said reflection surface plane and said contact plane is 45° or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, and
said mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material,
wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin.
4. The mirror according to claim 3 , wherein said active energy line reaction resin is one of phenol novolak type epoxy resin, cresol/volak type epoxy resin, glycylamine type epoxy resin and biphenyl type epoxy resin.
5. An optical circuit comprising:
a substrate;
an optical fiber or an optical waveguide provided for said substrate;
a photodiode or a surface emission type laser provided for said substrate;
a mirror connected with said substrate;
at least a cantilever of said substrate, wherein said mirror is installed in a tip portion of said at least a cantilever; and
an expanding and contracting member which moves said tip portion upwardly and downwardly,
wherein said mirror comprises a multi-layer thin film, which comprises a first layer and a second layer,
said first layer is a reflection surface plane, said second layer has a contact plane with a substrate,
an angle between said reflection surface plane and said contact plane is 45° or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal and
said mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material.
6. The optical circuit according to claim 5 , wherein said expanding and contracting member is one of a piezoelectric element, an electric distortion actuator, a magnetic distortion actuator, and a phase transition material.
7. An optical circuit comprising:
a substrate;
an optical fiber or an optical waveguide provided for said substrate;
a photodiode or a surface emission type laser provided for said substrate; and
a mirror connected with said substrate,
wherein said mirror comprises a multi-layer thin film, which comprises a first layer and a second layer,
said first layer is a reflection surface plane, said second layer has a contact plane with a substrate,
an angle between said reflection surface plane and said contact plane is 45° or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal, and
said mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material,
wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin.
8. The optical circuit according to claim 7 , wherein said active energy line reaction resin is one of phenol novolak type epoxy resin, cresol/volak type epoxy resin, glycylamine type epoxy resin and biphenyl type epoxy resin.
9. An optical circuit comprising:
a substrate;
an optical fiber or an optical waveguide provided for said substrate;
a photodiode or a surface emission type laser provided for said substrate; and
a mirror jointed with said substrate,
wherein said mirror comprises a gold layer, which comprises a reflection surface plane and a contact plane,
an angle between said reflection surface plane and said contact plane is 45° or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal and
said mirror has an interior concave portion adjacent to the reflection surface plane which is filled with a non-atmospheric material,
wherein said non-atmospheric material is one of a resin composition containing an active energy line polymerization initiator and an active energy line reaction resin.
10. The optical circuit according to claim 9 , wherein said active energy line reaction resin is one of phenol novolak type epoxy resin, cresol/volak type epoxy resin, glycylamine type epoxy resin and biphenyl type epoxy resin.