IP Library Granted Patent US 7,253,064
Granted Patent B2
US 7,253,064 · App. 10/853,538 · Granted Aug 7, 2007

Cascode I/O driver with improved ESD operation

Assignee: Micron Technology, Inc.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,253,064
App. No.
10/853,538
Granted
Aug 7, 2007
Kind
B2
Abstract

A cascode I/O driver is described that includes a barrier formed in the shared region between the two transistors. The barrier region allows the I/O driver to be designed to primarily meet I/O requirements. Accordingly, improved operating speeds are achieved. An system is described that includes an I/O driver in parallel with an ESD device. In an embodiment, the I/O driver may assist the ESD device in discharging electrostatic, after the ESD begins conducting.

Claims (63)

1. A method, comprising:

forming a first transistor in a substrate;

forming a second transistor in the substrate having a shared source/drain region with the first transistor;

forming a barrier in the shared region; and

forming a non-conducting region between a drain region of the first transistor and a source region of the second transistor in a portion of a doped well, wherein the width of the non-conductive region is adjusted to provide a specified breakdown voltage of a parasitic feature.

2. The method of claim 1 , wherein forming the barrier includes removing a portion of the shared region and inserting a non-conductive material in the portion of the shared region.

3. The method of claim 2 , wherein removing the portion of the shared region includes etching the shared region.

4. The method of claim 1 , wherein forming the first transistor includes forming a MOS transistor.

5. The method of claim 4 , wherein forming the second transistor includes forming a MOS transistor.

6. The method of claim 4 , wherein forming the first transistor includes forming an active well in the substrate.

7. The method of claim 6 , wherein forming the barrier includes forming the barrier to extend into the active well in the substrate.

8. The method of claim 1 , wherein forming a non-conducting region includes forming the non-conductive region using the barrier.

9. The method of claim 8 , wherein the forming includes shaping the non-conductive region using the barrier and the well.

10. A method, comprising:

simultaneously forming a first transistor and a second transistor in a substrate such that the first and second transistors are in a cascode configuration with a shared region;

forming a barrier in the shared region; and

forming a non-conducting region between the first transistor and the second transistor in a portion of a doped well, wherein the width of the non-conductive region is adjusted to provide a specified breakdown voltage of a parasitic bipolar transistor.

11. The method of claim 10 , wherein forming the barrier includes removing a portion of the shared region and inserting a non-conductive material in the portion of the shared region.

12. The method of claim 11 , wherein removing the portion of the shared region includes etching the shared region.

13. The method of claim 10 , wherein forming the first transistor includes forming a MOS transistor.

14. The method of claim 13 , wherein forming the second transistor includes forming a MOS transistor.

15. The method of claim 13 , wherein forming the first transistor includes forming an active well in the substrate.

16. The method of claim 15 , wherein forming the barrier includes forming the barrier to extend into the active well in the substrate.

17. A method, comprising:

forming a doped region having a first conductivity type in a substrate;

forming a set of cascode-connected transistors having channels in the doped region;

forming a barrier in a shared region of the cascode-connected transistors; and

forming a non-conducting region between the set of cascode-connected transistors in a portion of a doped well, wherein the width of the non-conductive region is to provide a specified breakdown voltage of a parasitic feature.

18. The method of claim 17 , wherein forming the barrier includes removing a portion of the shared region and inserting a non-conductive material in the portion of the shared region.

19. The method of claim 18 , wherein removing the portion of the shared region includes etching the shared region.

20. The method of claim 17 , wherein forming a non-conducting region includes forming the non-conductive region using the barrier.

21. The method of claim 20 , wherein the forming includes shaping the non-conductive region using the barrier and the well.

22. A method, comprising:

forming a doped region having a first conductivity type in a substrate;

forming a set of cascode-connected transistors having channels in the doped region, wherein forming the set of transistors includes:

forming a first diffusion region having a second conductivity type in the doped region;

forming a second diffusion region having the second conductivity type in the doped region; and

forming a third diffusion region having the second conductivity type in the doped region;

forming a barrier in the second diffusion region; and

forming a non-conducting region between the set of cascode-connected transistors in a portion of a doped well, wherein forming the non-conducting region includes adjusting the width of the non-conductive region to provide a specified parasitic breakdown voltage.

23. The method of claim 22 , wherein forming the set of transistors includes masking a surface of the doped region to create openings, and supplying dopants through the openings to form the first, second, and third diffusion regions.

24. The method of claim 23 , wherein supplying dopants through the openings includes simultaneously supplying dopants through the openings to form the first, second, and third diffusion regions.

25. The method of claim 23 , wherein forming the barrier includes masking the second diffusion region after supplying dopants to the second region and etching an unmasked portion of the second diffusion region to form a well therein.

26. The method of claim 25 , wherein forming the barrier includes filling the well with a non-conductive material.

27. The method of claim 25 , wherein forming the barrier includes extending the barrier through the doped region.

28. The method of claim 23 , wherein supplying dopants includes supplying N-type dopants.

29. The method of claim 22 , wherein the first conductivity type is a P-type and the second conductivity type is an N-type.

30. A method, comprising:

forming a doped region having a first conductivity type in a substrate;

forming a set of cascode-connected transistors having channels in the doped region, wherein forming the set of transistors includes:

forming a first diffusion region in the doped region;

forming a second diffusion region in the doped region; and

forming a third diffusion region in the doped region; and

forming a barrier in the second diffusion region such that the barrier extends through the second diffusion region into the doped region, wherein forming a barrier includes forming the barrier with at least one of a width and a depth of the barrier being adjusted to provide a specified parasitic breakdown voltage.

31. The method of claim 30 , wherein forming the set of transistors includes masking a surface of the doped region to create openings, and supplying dopants through the openings to form the first, second, and third diffusion regions.

32. The method of claim 31 , wherein diffusing dopants through the openings includes simultaneously supplying dopants through the openings to form the first, second, and third diffusion regions.

33. The method of claim 31 , wherein supplying dopants includes supplying N-type dopants.

34. The method of claim 30 , wherein forming the barrier includes masking the second diffusion region after supplying dopants to the second region and etching an unmasked portion of the second diffusion region to form a well therein.

35. The method of claim 30 , wherein forming the barrier includes filling the well with a non-conductive material.

36. The method of claim 30 , wherein the first conductivity type is a P-type and the second conductivity type is an N-type.

37. A method for improving operation of a cascode-type driver in an output buffer of an integrated circuit, comprising:

inserting a gap in the common node of the cascode-connected transistors, wherein a width of the gap is used to adjust a breakdown voltage of a parasitic transistor.

38. The method of claim 37 , wherein inserting the gap includes extending the gap into an active well of a substrate.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
Continuity (2)
Division 1023187900 · Aug 29, 2002
Related Publication 20040219760A1 · Nov 4, 2004