Structure and method for hyper-abrupt junction varactors
View Patent ↗A method and device providing a HA junction varactor which may be fabricated with a reduced variation in C-V tuning curve from one varactor to the next. The process produces a varactor with an active region formed substantially by doping an Si substrate with various dopants at various energy levels. Accordingly, unit-to-unit device variation is reduced because etching, growing, and deposition processes to make the active portion of the varactor are reduced or eliminated. The resulting HA junction has a more uniform thickness, and a more uniform doping profile.
1. A method of fabricating a varactor, comprising:
providing a semiconductor substrate;
doping a lower region of the semiconductor substrate with a first dopant at a first energy level;
doping a middle region of the semiconductor substrate with a second dopant at a second energy level lower than the first energy level, so as to form a hyper-abrupt junction in the middle region; and
doping an upper region of the semiconductor substrate with a third dopant at a third energy level lower than the second energy level, so as to form an anode in the upper region,
wherein the lower region includes a collector region and a cathode of the varactor, and the cathode is extended to a top surface of the semiconductor substrate through a reach-through implant region.
2. The method of claim 1 , further comprising selecting the first dopant from a first N-type dopant, selecting the second dopant from a second N-type dopant, and selecting the third dopant from a P-type dopant.
3. The method of claim 1 , wherein a bottom layer of the lower region of has a higher concentration of the first dopant than an upper layer of the lower region.
4. The method of claim 3 , wherein the collector of the varactor is formed in the upper layer of the lower region of the semiconductor substrate.
5. The method of claim 1 , further comprising forming at least one isolation region adjacent to the lower, middle, and upper regions of the semiconductor substrate.
6. The method of claim 1 , wherein the reach-through implant region is in electrical communication with the lower region of the semiconductor substrate.
7. The method of claim 1 , further comprising forming a silicide layer on the top of the semiconductor substrate above the upper region.
8. A method of fabricating a varaptor, comprising:
doping a lower region of a substrate layer with a first dopant having a dopant profile such that atoms having a first energy (“A”) penetrate to a first depth (“A′”) in the substrate layer forming a cathode and atoms having a second energy (“B”) penetrate to a second depth (“B′”) in the substrate layer forming a collector region above the cathode, wherein A>B and A′>B′;
doping a middle region of the substrate layer with a second dopant, so as to form a hyper-abrupt junction in the middle region, the middle region being tailored for an implant profile that forms an anode, the second dopant overlapping the collector region; and
doping an upper region of the substrate layer with a source/drain type implant to form the anode,
wherein the doping of the middle region has approximately less energy than the doping of the lower region and the doping of the upper region has approximately less energy than the doping of the middle region; and
wherein the cathode is extended to a top surface of the semiconductor substrate through a reach-through implant region.
9. The method of claim 8 , wherein the collector region and the cathode are formed in a single doping step via energy distribution of a single dopant type.
10. The method of claim 8 , wherein an active portion of the varactor is formed in a column from the substrate layer which is a semiconductor material.
11. The method of claim 1 , wherein the second dopant is deposited at a shallower depth than the first dopant and the third dopant is deposited at a shallower depth than the second.
12. The method of claim 1 , wherein only three doping steps are utilized to form the cathode, the collector, the hyper-abrupt junction, and the anode of the varactor.
13. A method of fabricating a varactor, comprising:
forming a semiconductor substrate;
doping a lower region of the semiconductor substrate with a first dopant at a first energy level;
doping a middle region of the semiconductor substrate with a second dopant at a second energy level lower than the first energy level, so as to form a hyper-abrupt junction in the middle region; and
doping an upper region of the semiconductor substrate with a third dopant at a third energy level lower than the second energy level, so as to form an anode,
wherein the lower region includes a collector region and a cathode that are formed in a single doping step via energy distribution of a single dopant type; and
wherein the cathode is extended to a top surface of the semiconductor substrate through a reach-through implant region.