Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
A wafer stage including an electrostatic chuck and a method for dechucking a wafer using the wafer stage are provided, wherein, the wafer stage includes an electrostatic chuck support, an electrostatic chuck, a lifting means, and a grounding means including a device for connecting the interconnections for grounding the lifting means. According to the method for dechucking a wafer, when a lifting means is in contact with a rear side of the wafer, the lifting means is grounded. Then, an electrostatic chuck is neutralized by supplying power to electrostatic electrodes, and the wafer is neutralized by supplying plasma to the wafer.
1. A method for dechucking a wafer comprising:
(a) processing a wafer formed on an electrostatic chuck of an enclosed chamber using plasma, wherein plasma used in the chamber is generated on an upper electrode;
(b) stopping plasma formation and turning off the voltage supplied to an electrostatic electrode and a lower electrode of the electrostatic chuck;
(c) contacting a lifting means with a rear side of the wafer;
(d) grounding the wafer;
(e) neutralizing the electrostatic chuck by supplying power to the electrostatic electrode and neutralizing the wafer by supplying plasma to the wafer; and
(f) dechucking the wafer by raising the lifting means.
2. A method for dechucking a wafer as claimed in claim 1 , wherein the process defined in (a) is an etching process.
3. A method for dechucking a wafer as claimed in claim 1 , wherein in (d), a device for connecting the interconnections of a grounding means connected to the lifting means is turned on.