Manufacturing method of glass substrate for magnetic disk, and manufacturing method of magnetic disk
View Patent ↗A method for manufacturing a glass substrate for a magnetic disk comprises mirror surface polishing and cleaning of a glass substrate, wherein polishing agent of which the principal component is rare-earth oxide with content of fluorine 5% by weight or less, is supplied to the glass substrate, the surface of the glass substrate is subjected to mirror surface polishing by relatively moving the polishing cloth and the glass substrate, then this glass substrate is brought into contact with a cleaning solution including ascorbic acid, fluorine ion, and sulfuric acid of 3% by weight or more, and the polishing agent is dissolved and removed. The concentration of the ascorbic acid included in the cleaning solution is 0.1% by weight or more, and the content of the fluorine ion is 1 ppm to 40 ppm. At least a magnetic layer is formed on the obtained glass substrate to manufacture a magnetic disk.
1. A method for manufacturing a glass substrate for a magnetic disk and comprising a mirror polishing process of a glass substrate and a cleaning process of the glass substrate;
wherein the mirror polishing process comprises the steps of:
applying, on the glass substrate, a polishing agent which includes rare-earth oxide as a main component and 5% or less of fluorine by weight; and
mirror polishing the surface of said glass substrate by relatively moving a polishing cloth and said glass substrate,
the cleaning process comprising the steps of:
contacting the glass substrate subjected to the mirror polishing step with a cleaning solution which includes ascorbic acid, fluorine ion, and 3% by weight or more of sulfuric acid; and
removing said polishing agent from the glass substrate by dissolving the polishing agent in the cleaning solution.
2. The method for manufacturing a glass substrate for a magnetic disk according to claim 1 , wherein said glass substrate is formed by amorphous aluminosilicate glass which includes, by weight, 58% to 75% of SiO 2 , 5% to 23% of Al 2 O 3 , 3% to 10% of Li 2 O, and 4% to 13% of Na 2 O, as principal components.
3. The method for manufacturing a glass substrate for a magnetic disk according to claim 1 , wherein the content of the fluorine ion included in said cleaning solution falls within a range between 1 ppm and 40 ppm.
4. The method for manufacturing a glass substrate for a magnetic disk according to claim 3 , wherein said glass substrate is formed by amorphous aluminosilicate glass which includes, by weight, 58% to 75% of SiO 2 , 5% to 23% of Al 2 O 3 , 3% to 10% of Li 2 O, and 4% to 13% of Na 2 O, as principal components.
5. The method for manufacturing a glass substrate for a magnetic disk according to claim 1 , wherein the concentration of the ascorbic acid included in said cleaning solution is 0.1% by weight or more.
6. The method for manufacturing a glass substrate for a magnetic disk according to claim 5 , wherein said glass substrate is formed by amorphous aluminosilicate glass which includes, by weight, 58% to 75% of SiO 2 , 5% to 23% of Al 2 O 3 , 3% to 10% of Li 2 O, and 4% to 13% of Na 2 O, as principal components.
7. The method for manufacturing a glass substrate for a magnetic disk according to claim 5 , wherein the content of the fluorine ion included in said cleaning solution falls within a range between 1 ppm and 40 ppm.
8. The method for manufacturing a glass substrate for a magnetic disk according to claim 7 , wherein said glass substrate is formed by amorphous aluminosilicate glass which includes, by weight, 58% to 75% of SiO 2 , 5% to 23% of Al 2 O 3 , 3% to 10% of Li 2 O, and 4% to 13% of Na 2 O, as principal components.
9. The method for manufacturing a glass substrate for a magnetic disk according to any one of claims 1 through 8 , wherein the surface of said glass substrate after said cleaning process has a mirror surface of which the maximum valley depth Rv is 4 nm or less.
10. A method for manufacturing a magnetic disk wherein at least a magnetic layer is formed on the glass substrate manufactured by the method for manufacturing the magnetic disk according to any one of claims 1 through 8 .
11. The method for manufacturing a magnetic disk according to claim 10 , wherein a magnetic disk for recording and reproducing information has bit recording density of 60 gigabits/inch 2 or more.
12. The method as claimed in claim 1 , wherein the cleaning process is executed on at least one surface of principal and end surfaces of the glass substrate so as to dissolve the polishing agent on the at least one surface.
13. The method claimed in claim 1 , wherein the mirror polishing step is carried out not only about the surface of the glass substrate but also an end surface of the glass substrate;
the end surface and the surface of the glass substrate being contacted with the cleaning solution to dissolve and remove the polishing agent in the removing step.
14. A method for manufacturing a glass substrate for a magnetic disk and comprising a mirror polishing process of the glass substrate and a cleaning process of the glass substrate, wherein the mirror polishing process comprises the steps of:
applying, on the glass substrate, a polishing agent which includes rare-earth oxide as a main component of 5% or less of fluorine by weight; and
mirror polishing the surface of said glass substrate by relatively moving a polishing cloth and said glass substrate;
the cleaning process comprising the steps of:
contacting the glass substrate subjected to the mirror polishing step with a cleaning solution which includes ascorbic acid, fluorine ion, and 3% by weight or more of sulfuric acid; and
removing said polishing agent from the glass substrate by dissolving the polishing agent in the cleaning solution without causing any recessed shaped faults to occur on the surface of the glass substrate due to the cleaning solution.