Display device and manufacturing method thereof
View Patent ↗A display device with improved reliability and a manufacturing method of the same with improved yield. A display device according to the invention comprises a display area including a first electrode, an insulating layer covering an edge of the first electrode, a layer containing an organic compound, which is formed on the first electrode, and a second electrode. The first electrode and the insulating layer are doped with an impurity element of one conductivity.
1. A manufacturing method of a display device comprising:
forming a thin film transistor over a first substrate;
forming an interlayer insulating film over the thin film transistor;
removing the interlayer insulating film selectively so that at least one opening is formed in the interlayer insulating film and a side surface of the interlayer insulating film has a tapered shape at an edge of the first substrate;
first doping an impurity element of one conductivity to the opening portion and the side surface of the interlayer insulating film;
forming a first electrode electrically connected to the thin film transistor over the interlayer insulating film;
forming an insulating layer covering an edge of the first electrode;
second doping an impurity element of one conductivity to the first electrode and the insulating layer;
forming a layer including an organic compound over the first electrode; and
forming a second electrode over the layer including an organic compound,
wherein at the first doping step, a high concentration impurity region is formed in a semiconductor layer of the thin film transistor.
2. The manufacturing method of a display device, according to claim 1 , wherein the method further comprises attaching a second substrate to the first substrate with a sealing member surrounding an outer edge of the interlayer insulating film.
3. The manufacturing method of a display device, according to claim 1 , wherein the high concentration impurity region is formed in a source region or a drain region of the semiconductor layer.
4. The manufacturing method of a display device, according to claim 1 , wherein the side surface of the interlayer insulating film is tapered in the range between 30 and 75°.
5. The manufacturing method of a display device, according to claim 1 , wherein the impurity element of one conductivity is doped so that a dosage thereof is equal in the first electrode and the insulating layer.
6. The manufacturing method of a display device, according to claim 1 , wherein the impurity element of one conductivity is doped so that the concentration thereof is in the range of 1×10 18 to 5×10 21 /cm 3 , and typically in the range of 2×10 19 to 2×10 21 /cm 3 .
7. The manufacturing method of a display device, according to claim 1 , wherein at least one element selected from elements belonging to Group 13 or Group 15 in the periodic table is doped as the impurity element of one conductivity.
8. The manufacturing method of a display device, according to claim 1 , wherein the interlayer insulating film or the insulating layer is formed by an application method using a silicon oxide film including an alkyl group.
9. The manufacturing method of a display device, according to claim 1 , wherein the first electrode is formed by sputtering using as a target indium tin oxide including silicon oxide.
10. The manufacturing method of a display device, according to claim 1 , wherein the insulating layer is colored to be used as a black matrix.