Apparatus for treating substrate
The present is directed to an apparatus for etching the top edge and bottom of a wafer. The apparatus includes a substrate support part for supporting a wafer and a movable protect part for preventing fluid for an etch from flowing into a non-etch portion of the wafer. The top edge and bottom of the wafer is etched by a wet etch, and a boundary of the non-etch portion and the edge of the wafer is etched by a dry etch.
1. An apparatus for treating a substrate, comprising:
a substrate support part having a rotatable support plate and a support pin protruding from a top surface of the support plate to support a substrate to be spaced apart from a top surface of the support plate;
a wet etch part for supplying wet etchant to a space between a bottom surface of the substrate placed on the support pin and the support plate and to an edge portion of the top surface of the substrate to perform an etch; and
a dry etch part for supplying plasma to a boundary portion between the edge portion and a non-etch portion of the top surface of the substrate placed on the support plate to perform an etch, the non-etch portion being a portion to be unetched, and
said wet etch part and said dry etch part, capable of performing an etch on said substrate simultaneously.
2. The apparatus of claim 1 , wherein the dry etch part comprises:
a plasma torch for enabling internally supplied gas to be excited into a plasma state and for injecting generated plasma to the edge of the substrate;
a torch moving part for moving the plasma torch vertically or horizontally; and
a gas supply part for supplying gas into the plasma torch.
3. The apparatus of claim 2 , wherein the gas supply part comprises:
a first supply pipe configured for supplying an etch gas to the plasma torch during an etch process; and
a second supply pipe configured for supplying oxygen gas onto the substrate after the etch process is completed.
4. The apparatus of claim 1 , further comprising:
a protection part spaced apart from the top surface of the wafer for preventing the wet etchant from flowing into the non-etch portion of the top surface of the substrate.
5. The apparatus of claim 2 , wherein the protection part comprises:
a protect cover having a protrusion formed to correspond to a boundary portion between the non-etch portion and the edge portion of the top surface of the substrate and a bottom where a supply hole is configured for injecting nitrogen gas or inert gas into the protrusion; and
a cover moving part for moving the protect cover vertically or horizontally.
6. The apparatus of claim 5 , wherein the plasma torch is connected with the protect cover.
7. The apparatus of claim 1 , wherein the wet etch part comprises:
a chemical flow path formed in the support plate as a flow path of an etchant supplied to the space; and
a chemical supply pipe connected with the chemical supply part and the chemical flow path to supply an etchant to the chemical flow path.
8. The apparatus of claim 1 , wherein the edge portion of the top surface of the substrate and the bottom surface of the substrate are etched by the wet etch part, and a portion adjacent to the boundary portion between the edge portion and the non-etch portion of the substrate is etched by the dry etch part.
9. The apparatus of claim 2 , wherein the plasma torch comprises: a body in which a gas inflow space is formed, the body being made of dielectric material;
a first electrode inserted into the gas inflow space of the body;
a second electrode disposed to cover at least a part of the outer sidewall of the body; and
a dielectric substance covering at least a part of the second electrode, the dielectric substance being made of dielectric material.
10. The apparatus of claim 9 , wherein the gas inflow space is straightly formed in the body, and the first electrode is a rod-shaped electrode that is straightly disposed at the center of the space along the gas inflow space.
11. The apparatus of claim 9 , wherein the dielectric substance is disposed to cover the end of the first electrode.
12. The apparatus of claim 9 , wherein the dielectric substance is formed by coating the first electrode with dielectric material.
13. The apparatus of claim 9 , wherein the second electrode is a coil-type electrode or a plate-type electrode.
14. The apparatus of claim 9 , wherein the plasma torch further comprises: a cover disposed to cover the second electrode to prevent the second electrode from being exposed to the outside.
15. The apparatus of claim 9 , wherein the plasma torch further comprises: at least one electrode holder disposed at the space in the body to fix the first electrode.
16. The apparatus of claim 9 , further comprising:
a magnet for establishing a magnetic field at a migration path of plasma generated in the body to offer an acceleration force to the plasma.
17. The apparatus of claim 16 , wherein the magnet is disposed to surround the outer sidewall of the body below the second electrode.
18. The apparatus of claim 16 , wherein the magnet is installed at the support part.