Polymer compound, resist composition and dissolution inhibitor agent containing the polymer compound
Provided are a polymer compound having high transparency for use in a photoresist composition for microfabrication of the next generation, a resist composition using the polymer compound as a base polymer, and a dissolution inhibitor agent composed of the polymer compound. To ensure etching resistance, an alicyclic group is introduced into a side chain portion. Hydrogen atoms on the ring of the alicyclic group are highly fluorinated to ensure transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 . As the alicyclic group, a polycyclic group is preferably used. Hydrogen atoms are highly fluorinated by preferably substituting all hydrogen atoms on the ring by fluorine atoms, that is, forming a perfluoroalicyclic group. The resist composition is formed by using the polymer compound as a base polymer and further, the dissolution inhibitor agent is formed of the polymer compound.
1. A polymer compound comprising a monomeric unit derived from acrylic ester or methacrylic ester having a polycyclic group at a side chain, wherein all hydrogen atoms on the ring of the polycyclic group are fluorinated and the polycyclic group has a transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 .
2. The polymer compound according to claim 1 , wherein the polycyclic group is an adamantyl group.
3. The polymer compound according to claim 1 , further comprising a second monomeric unit.
4. The polymer compound according to claim 3 , wherein the second monomeric unit has an acid dissociable group.
5. The polymer compound according to claim 3 , wherein the second monomeric group is a monomeric unit derived from acrylic ester or methacrylic ester.
6. A polymer compound comprising a monomeric unit having an alicyclic group at a side chain, wherein more than half the number of hydrogen atoms on the ring of the alicyclic group are substituted by fluorine atoms and has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 and, wherein the alicyclic group has a hydrophilic group on a ring.
7. A polymer compound according to claim 6 wherein the alicyclic group is an adamantyl group.
8. A polymer compound according to claim 6 wherein the monomeric unit is derived from an acrylic ester or a methacrylic ester.
9. A polymer compound comprising a monomeric unit having an alicyclic group at a side chain, wherein more than half the number of hydrogen atoms on the ring of the alicyclic group are substituted by fluorine atoms and has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 and wherein the monomeric unit is a unit derived from vinyl ether.
10. A polymer compound comprising a monomeric unit having an alicyclic group at a side chain, wherein more than half the number of hydrogen atoms on the ring of the alicyclic group are substituted by fluorine atoms and has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 and wherein the alicyclic group has a hydrophilic group on a ring and said polymer further comprising a second monomeric unit, wherein the second monomeric unit has an acid insoluble group.
11. A polymer compound comprising a monomeric unit having an alicyclic group at a side chain, wherein more than half the number of hydrogen atoms on the ring of the alicyclic group are substituted by fluorine atoms and has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 , wherein the monomeric unit is a unit derived from vinyl ether and said polymer further comprising a second monomeric unit, wherein the second monomeric unit has an acid insoluble group.
12. A polymer compound comprising a monomeric unit having an alicyclic group at a side chain, wherein more than half the number of hydrogen atoms on the ring of the alicyclic group are substituted by fluorine atoms and has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 wherein the alicyclic group has a hydrophilic group on a ring and said polymer further comprising a second monomeric unit wherein the second monomeric unit is a monomeric unit derived from a vinylic double bond.
13. A polymer compound comprising a monomeric unit having an alicyclic group at a side chain, wherein more than half the number of hydrogen atoms on the ring of the alicyclic group are substituted by fluorine atoms and has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 , wherein the monomeric unit is a unit derived from vinyl ether and said polymer further comprising a second monomeric unit wherein the second monomeric unit is a monomeric unit derived from a vinylic double bond.
14. A polymer compound having a monomeric unit represented by general formula (1)
where n is an integer; X is an ester group of carboxylic acid,
ether group (—O—), —CH 2 —O—, or an alkylidene group,
Z enclosed by a circle is an adamantyl group wherein more than half the number of hydrogen atoms on the adamantyl group are substituted by fluorine atoms; R 1 , R 2 , R 3 , R 5 , R 6 and R 7 are independently one selected from the group consisting of a hydrogen atom, lower alkyl group, fluorine atom, and fluorinated lower alkyl group; 1 is an integer of 0 to 3; and R 4 is a hydroxyl group,
and having transparency to light of 157 nanometer wavelength represented by an adsorption coefficient equal to or less than 3.0 μm −1 .
15. The polymer compound according to claim 14 , wherein the adamantyl group is a perfluoroadamantyl group.
16. A resist composition comprising a polymer compound having a monomeric unit derived from acrylic ester or methacrylic ester having a polycyclic group at a side chain, wherein all hydrogen atoms on the ring of the polycyclic group are fluorinated and said polymer compound has a transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 .
17. The resist composition according to claim 16 , comprising the polymer compound as a base polymer.
18. The resist composition according to claim 16 , comprising the polymer compound as a dissolution inhibitor agent.
19. A resist composition comprising a polymer compound having a monomeric unit represented by general formula (1)
where n is an integer; X is an ester group of carboxylic acid,
ether group (—O—), —CH 2 —O—, or an alkylidene group,
Z enclosed by a circle is an adamantyl group wherein more than half the number of hydrogen atoms on the adamantyl group are substituted by fluorine atoms; R 1 , R 2 , R 3 , R 5 , R 6 and R 7 are independently one selected from the group consisting of a hydrogen atom, lower alkyl group, fluorine atom, and fluorinated lower alkyl group; 1 is an integer of 0 to 3; and R 4 is a hydroxyl group;
and having a transparency to light of 157 nanometer wavelength represented by an adsorption coefficient equal to or less than 3.0 μm −1 .
20. The resist composition according to claim 19 , comprising the polymer compound as a base polymer.
21. The resist composition according to claim 19 , comprising the polymer compound as a dissolution inhibitor agent.
22. A resist dissolution inhibitor agent comprising a polymer compound having a monomeric unit derived from acrylic ester or methacrylic ester having a polycyclic group at a side chain, wherein all hydrogen atoms on the ring of the polycyclic group are fluorinated and said polymer compound has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 μm −1 .
23. A resist dissolution inhibitor agent comprising a polymer compound having a monomeric unit represented by general formula (1)
where n is an integer; X is an ester group of carboxylic acid,
ether group (—O—), —CH 2 —O—, or an alkylidene group,
Z enclosed by a circle is an adamantyl group wherein more than half the number of hydrogen atoms on the adamantyl group are substituted by fluorine atoms; R 1 , R 2 , R 3 , R 5 , R 6 and R 7 are independently one selected from the group consisting of a hydrogen atom, lower alkyl group, fluorine atom, and fluorinated lower alkyl group; 1 is an integer of 0 to 3; and R 4 is a hydroxyl group,
and having a transparency to light of 157 nanometer wavelength represented by an adsorption coefficient equal to or less than 3.0 μm −1 .