Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device

1. A displacement detection device for detecting displacement of an inspection target having a diffraction grating in the direction of a lattice vector, on the basis of an interference signal, the device comprising:

a light source for emitting light; a beam splitter for splitting the light emitted from the light source into two light beams and radiating the two light beams; a first lens provided between the light source and the beam splitter; reflection means for reflecting two first diffracted light beams obtained as the two light beams radiated from the beam splitter are diffracted by the diffraction grating; light splitting means for combining two second diffracted light beams obtained as the first diffracted light beams reflected by the reflection means are diffracted by the diffraction grating, to generate combined light, and then splitting the combined light into plural light beams; polarization means for transmitting only a predetermined polarized component of the split combined light; light-receiving means for photoelectrically converting coherent light transmitted through the polarization means and thus generating the interference signal; and a second lens provided between the polarization means and the light-receiving means.

2. The displacement detection device as claimed in claim 1 , wherein the light source, the beam splitter, the first lens, the light splitting means, the polarization means, the light-receiving means, and the second lens are provided within the same package and constituted as independent units.

3. The displacement detection device as claimed in claim 1 , further comprising a polarization element adapted for changing the polarized component so that the direction of polarization of the first diffracted light diffracted by the diffraction grating and the direction of polarization of the first diffracted light reflected by the reflection means become orthogonal to each other, and provided integrally with the reflection means.

4. The displacement detection device as claimed in claim 1 , wherein the two light beams radiated from the beam splitter are converged at equal lengths from the light source, respectively.

5. The displacement detection device as claimed in claim 1 , wherein the reflection means is arranged so that interference fringes of the two second diffracted light beams superposed by the light-receiving means are substantially null fringes or the interference signal is substantially at its maximum.

6. The displacement detection device as claimed in claim 1 , wherein the light source and the reflection means are arranged at substantially conjugate positions in a geometrical-optical image forming relation, and the reflection means and the light-receiving means are arranged at substantially conjugate positions in a geometrical-optical image forming relation.

7. A displacement detection device for detecting displacement of an inspection target having a reflection-type diffraction grating in the direction of a lattice vector, on the basis of an interference signal, the device comprising:

a light source for emitting light; a polarizing beam splitter for splitting the light emitted from the light source into two light beams having difference polarized components and radiating the two light beams; a phase plate arranged between the light source and the polarizing beam splitter and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing beam splitter; image formation means for causing image formation of the two light beams radiated from the beam splitter onto a lattice plate of the diffraction grating; reflection means for reflecting two first diffracted light beams obtained as the two light beams radiated from the beam splitter are diffracted by the diffraction grating; light splitting means for combining two second diffracted light beams obtained as the first diffracted light beams reflected by the reflection means are diffracted by the diffraction grating, to generate combined light, and then splitting the combined light into plural light beams; polarization means for transmitting only a predetermined polarized component of the split combined light; and light-receiving means for photoelectrically converting coherent light transmitted through the polarization means and thus generating the interference signal.

8. A displacement detection device for detecting displacement of an inspection target having a diffraction grating in the direction of a lattice vector, on the basis of an interference signal, the device comprising:

a light source for emitting light; a polarizing beam splitter for splitting the light emitted from the light source into two light beams having difference polarized components and radiating the two light beams; reflection means for reflecting two first diffracted light beams obtained as the two light beams radiated from the beam splitter are diffracted by the diffraction grating; light splitting means for combining two second diffracted light beams obtained as the first diffracted light beams reflected by the reflection means are diffracted by the diffraction grating, to generate combined light, and then splitting the combined light into plural light beams; polarization means for transmitting only a predetermined polarized component of the split combined light; a lens unit for leading plural coherent light beams transmitted through the polarization means to predetermined positions, respectively; and light-receiving means for photoelectrically converting the plural coherent light beams led by the lens unit and thus generating the interference signal.