Method of manufacturing a thin film magnetic head
A manufacturing method of a thin film magnetic head is provided. In the manufacturing method of a thin film magnetic head, an inorganic insulating layer is formed along at least a sidewall surface of each conductor part. A gap of each conductor part is filled by an organic insulating layer. An upper surface of the conductor part, a magnetic pole portion, and a connecting layer are grinded to be planar with an organic insulating layer and an inorganic insulating layer. During an upper surface of each conductor part is grinded, the inorganic insulating layer, which is hard, suppresses a shear drop of each conductor part by grinding.
1. A manufacturing method of a thin film magnetic head, the method comprising the processes of:
(a) forming a protrusion on a side of a surface facing a recording medium on a first magnetic portion, and a connecting portion, on a height side on the first magnetic portion;
(b) forming a coil layer between the protrusion and the connecting portion on the first magnetic portion, through an insulating base layer;
(c) forming an inorganic insulating layer along at least a sidewall surface of each conductor part constituting the coil layer;
(d) filling a gap between each conductor part with an organic insulating layer;
(e) grinding an upper surface of the protrusion, an upper surface of each conductor part, and an upper surface of the connecting portion to a predetermined position with the organic insulating layer and the inorganic insulating layer to expose each upper surface of the protrusion, each conductor part and connecting portion coplanarly; and
(f) forming a second magnetic portion from the protrusion to the connecting portion.
2. The manufacturing method of the thin film magnetic head according to claim 1 , wherein in the (c) process, the inorganic insulating layer is formed from an upper edge between the upper surface and the sidewall surface of each conductor part along the sidewall surface, to at least a side lower than the grinding position in the (e) process.
3. The manufacturing method of the thin film magnetic head according to claim 1 , wherein the inorganic insulating layer is formed by a chemical vapor deposition method.
4. The manufacturing method of the thin film magnetic head according to claim 3 , wherein the inorganic insulating layer is formed by an atomic layer deposition method.
5. The manufacturing method of the thin film magnetic head according to claim 1 , wherein an inorganic insulating material used for the inorganic insulating layer is selected from materials with a grinding speed slower than that of the conductor part and the organic insulating layer.
6. The manufacturing method of the thin film magnetic head according to claim 5 , wherein the inorganic insulating layer is selected from at least one of Al 2 O 3 , HfO 2 , TiO 2 and Ta 2 O 5 .