Retaining ring with shaped surface
A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
1. A retaining ring for use in chemical mechanical polishing, comprising:
a substantially annular body having a top surface, an inner diameter surface adjacent to the top surface, an outer diameter surface adjacent to the top surface, and a bottom surface, wherein in a cross section across a radius of the retaining ring, the bottom surface has at least one linear section that slopes, and wherein a difference in height across the bottom surface is between 0.002 mm and 0.02 mm.
2. The retaining ring of claim 1 , wherein the bottom surface has exactly one frustoconical surface between the inner diameter surface and the outer diameter surface.
3. The retaining ring of claim 2 , wherein the frustoconical surface extends from the inner diameter surface to the outer diameter surface.
4. The retaining ring of claim 3 , wherein the bottom surface is sloped downwardly from the outer diameter surface to the inner diameter surface.
5. The retaining ring of claim 1 , wherein the bottom surface includes exactly one planar surface that is parallel to the top surface.
6. The retaining ring of claim 5 , wherein the planar surface is closer to the outer diameter surface than the inner diameter surface.
7. The retaining ring of claim 5 , wherein the planar surface is closer to the inner diameter surface than the outer diameter surface.
8. The retaining ring of claim 1 , wherein the bottom surface has exactly two linear sections that are sloped along a radial cross section between the inner diameter surface and the outer diameter surface.
9. The retaining ring of claim 8 , wherein the bottom surface includes exactly one planar surface that is located between the two linear sections, wherein the one planar surface is parallel to the top surface.
10. The retaining ring of claim 1 , wherein the retaining ring includes two individual pieces.
11. The retaining ring of claim 1 , wherein the bottom surface of the retaining ring includes polyamide-imide.
12. The retaining ring of claim 11 , wherein the retaining ring includes an upper portion having the top surface and a bottom portion having the bottom surface, the bottom portion is formed of polyamide-imide, and the upper portion is formed of a metal that is more rigid than the polyamide-imide.
13. A retaining ring comprising:
an annular body having a bottom surface, an inner surface, an outer surface and a top surface configured for attachment to a carrier head, wherein the retaining ring includes a first portion and a second portion having different surface roughness, wherein the bottom surface has a surface roughness less than the surface roughness of the inner surface and outer surface.
14. The retaining ring of claim 13 , wherein the first portion and second portion are located on the bottom surface.
15. The retaining ring of claim 13 , wherein the first portion is located on the bottom surface and the second portion is located on one or both of the inner and outer surfaces.