Gate structure and a transistor having asymmetric spacer elements and methods of forming the same
Methods for forming asymmetric gate structures comprising spacer elements disposed on the opposed sides of a gate electrode and having a different width are disclosed. The asymmetric gate structures are employed to form an asymmetric design of a halo region and extension regions of a field effect transistor using a symmetric implantation scheme, or to further enhance the effectiveness of asymmetric implantation schemes. The transistor performance may be significantly enhanced for a given basic transistor architecture. In particular, a large overlap area may be created at the source side with a steep concentration gradient of the PN junction due to the provision of the halo region, whereas the drain overlap may be significantly reduced or may even be completely avoided to further enhance the transistor performance.
1. A method, comprising:
performing an etching process on a layer of gate electrode material to define a partially etched gate electrode, said partially etched gate electrode having opposed sidewalls, side regions adjacent to said opposed sidewalls and a sub-layer of gate electrode material extending laterally away from said sidewalls;
performing a tilt angle ion implantation process to incorporate dopants into said partially etched gate electrode to obtain a different dopant concentration in each of said side regions, said ion implantation process also introducing dopants into at least a portion of said sub-layer; and
performing an oxidation process to form spacer elements adjacent to each of said side regions, each of said spacer elements having a different width correlated with said dopant concentration of the respective underlying side region.
2. The method of claim 1 , wherein said gate electrode comprises polysilicon.
3. The method of claim 1 , wherein said spacer elements comprise silicon dioxide.
4. The method of claim 1 , wherein said tilt angle is in a range of approximately 10-50 degrees.
5. The method claim 1 , wherein said dopants comprise at least one of boron, phosphorous, arsenic and indium.
6. The method of claim 1 , wherein said gate electrode and said spacer elements form a gate structure serving as an implantation mask for a subsequent source/drain extension implantation into an underlying semiconductor region defining a source side and an opposed drain side of said gate electrode.
7. The method of claim 6 , wherein the width of said spacer elements is greater on said drain side than on said source side.
8. The method of claim 7 , wherein an asymmetric halo region is formed in said semiconductor region.
9. A method, comprising:
providing a semiconductor region having formed thereabove a gate electrode having opposed sidewalls;
forming asymmetric spacer elements adjacent to said opposed sidewalls, each of said asymmetric spacer elements having a different width, wherein forming said asymmetric spacer elements comprises:
performing a tilt angle ion implantation process to implant dopants into an unmasked layer of spacer material formed above said gate electrode, said tilt angle ion implantation process providing an asymmetric distribution of said dopants; and
after performing said tilt angle ion implantation process, performing an isotropic etch process on said layer of spacer material; and
implanting additional dopants into said semiconductor region using said gate electrode and said spacer elements as masking elements.
10. The method of claim 9 , wherein said spacer elements comprise at least one of silicon oxide and silicon nitride.
11. The method of claim 9 , wherein said tilt angle is in a range of approximately 10-50 degrees.
12. The method of claim 9 , wherein said dopants implanted during said tilt angle ion implantation process comprise at least one of silicon, germanium, nitrogen, argon, oxygen, neon and xenon.
13. The method of claim 9 , further comprising forming a liner layer prior to forming said layer of spacer material, the material of said liner layer having an etch selectivity to said layer of spacer material.