Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate
An apparatus which exposes a substrate to radiant energy includes a unit which holds a first mask having a pattern which includes a pattern of a target mark, a unit which projects a pattern of radiant energy to the substrate through the first mask, a unit which holds a second mask having an auxiliary pattern for identifying the target mark to be formed on the substrate, and a unit which controls the projecting unit so as to project a pattern of radiant energy to the substrate through the second mask.
1. An apparatus which transfers a device pattern onto a substrate, said apparatus comprising:
a stage which holds a mask having the device pattern and a target mark pattern;
a reference plate placed on the stage and having an auxiliary pattern for identifying the target mark pattern;
a projection unit which projects the device pattern as well as the target mark pattern; and
a control unit which controls the stage such that the auxiliary pattern is transferred onto the substrate for identifying the target mark pattern.