Multiple precursor cyclical deposition system
Embodiments of the present invention relate to an apparatus and method of cyclical deposition utilizing three or more precursors in which delivery of at least two of the precursors to a substrate structure at least partially overlap. One embodiment of depositing a ternary material layer over a substrate structure comprises providing at least one cycle of gases to deposit a ternary material layer. One cycle comprises introducing a pulse of a first precursor, introducing a pulse of a second precursor, and introducing a pulse of a third precursor in which the pulse of the second precursor and the pulse of the third precursor at least partially overlap. In one aspect, the ternary material layer includes, but is not limited to, tungsten boron silicon (WB x Si y ), titanium silicon nitride (TiSi x N y ), tantalum silicon nitride (TaSi x N y ), silicon oxynitride (SiO x N y ), and hafnium silicon oxide (HfSi x O y ). In one aspect, the composition of the ternary material layer may be tuned by changing the flow ratio of the second precursor to the third precursor between cycles.
1. A method for forming a hafnium-containing dielectric material layer, comprising:
sequentially pulsing a first precursor, a second precursor, and a hafnium-containing precursor, wherein the first precursor is pulsed at least partially overlapping with the hafnium-containing precursor or the second precursor.
2. The method of claim 1 , wherein the second precursor is water or diborane.
3. The method of claim 1 , wherein the second precursor is an oxygen-containing precursor.
4. The method of claim 3 , wherein the oxygen-containing precursor is selected from the group consisting of water vapor, oxygen, ozone, and combinations thereof.
5. The method of claim 1 , wherein the second precursor is ammonia.
6. The method of claim 1 , wherein, the second precursor is water.
7. The method of claim 1 , wherein the first precursor is a silicon precursor.
8. The method of claim 7 , wherein the silicon precursor selected from the group consisting of tetrachlorosilane, dichlorosilane, and hexachlorodisilane.
9. A method for forming a hafnium-containing dielectric material layer, comprising:
sequentially pulsing a first precursor, a silicon precursor, and a hafnium-containing precursor, wherein the silicon precursor is pulsed at least partially overlapping with the hafnium-containing precursor or the first precursor.
10. The method of claim 9 , wherein the first precursor is water or diborane.
11. The method of claim 9 , wherein the first precursor is an oxygen-containing precursor.
12. The method of claim 11 , wherein the oxygen containing precursor is selected from the group consisting of water vapor, oxygen, ozone, and combinations thereof.
13. The method of claim 9 , wherein the first precursor is ammonia.
14. The method of claim 9 , wherein the first precursor is water.
15. The method of claim 9 , wherein silicon precursor is selected from the group consisting of tetrachlorosilane, dichiorosilane, and hexachlorodisilane and wherein the first precursor is water or diborane.