Display device and method of fabricating the same
View Patent ↗To achieve promotion of stability of operational function of display device and enlargement of design margin in circuit design, in a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate, the semiconductor element includes a photosensitive organic resin film as an interlayer insulating film, an inner wall face of a first opening portion provided at the photosensitive organic resin film is covered by a second insulating nitride film, a second opening portion provided at an inorganic insulating film is provided on an inner side of the first opening portion, the semiconductor and a wiring are connected through the first opening portion and the second opening portion and the pixel electrode is provided at a layer on a lower side of an activation layer.
1. A display device comprising a pixel portion having a plurality of pixels,
wherein each of the pixels is provided with a pixel electrode, and
wherein the pixel electrode is connected to a semiconductor element over a substrate,
wherein the semiconductor element comprises:
an activation layer,
a gate insulating film in contact with the activation layer,
a gate electrode opposed to the activation layer through the gate insulating film,
a first insulating nitride film provided over the activation layer,
an organic resin film provided over the first insulating nitride film,
a second insulating nitride film provided over the organic resin film, and
a wiring provided over the second insulating nitride film;
wherein an inner wall face of a first opening portion formed in the organic resin film is covered by the second insulating nitride film;
wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;
wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion;
wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;
wherein a first part of an insulating film is formed over the pixel electrode; and
wherein the activation layer is formed over a second part of the insulating film.
2. A display device comprising a pixel portion having a plurality of pixels,
wherein each of the pixels is provided with a pixel electrode,
wherein the pixel electrode is connected to a semiconductor element over a substrate,
wherein the semiconductor element comprises:
an activation layer,
a gate insulating film in contact with the activation layer,
a gate electrode opposed to the activation layer through the gate insulating film,
a first insulating nitride film provided over the activation layer,
an organic resin film provided over the first insulating nitride film,
a second insulating nitride film provided over the organic resin film, and
a wiring provided over the second insulating nitride film;
wherein an inner wall face of a first opening portion formed in the organic resin film is covered by the second insulating nitride film, a bottom face of said first opening portion including a region in which the first insulating nitride film and the second insulating nitride film are brought into contact with each other over 0.3 through 3 μm;
wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;
wherein the activation layer in the wiring are connected through the first opening portion and the second opening portion;
wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;
wherein a first part of an insulating film is formed over the pixel electrode; and
wherein the activation layer is formed over a second part of the insulating film.
3. A display device comprising a pixel portion having a plurality of pixels,
wherein each of the pixels is provided with a pixel electrode,
wherein the pixel electrode is connected to a semiconductor element over a substrate,
wherein the semiconductor element comprises:
an activation layer,
a gate insulating film in contact with the activation layer,
a gate electrode opposed to the activation layer through the gate insulating film,
a first insulating nitride film provided over the activation layer,
an acrylic film provided over the first insulating nitride film,
a second insulating nitride film provided over the acrylic film, and
a wiring provided over the second insulating nitride film;
wherein an inner wall face of a first opening portion formed in the acrylic film is covered by the second insulating nitride film;
wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;
wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion;
wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;
wherein a first part of an insulating film is formed over the pixel electrode; and
wherein the activation layer is formed over a second part of the insulating film.
4. A display device comprising a pixel portion having a plurality of pixels,
wherein each of the pixels is provided with a pixel electrode,
wherein the pixel electrode is connected to a semiconductor element over a substrate,
wherein the semiconductor element comprises:
an activation layer,
a gate insulating film in contact with the activation layer,
a gate electrode opposed to the activation layer through the gate insulating film,
a first insulating nitride film provided over the activation layer,
an acrylic film provided over the first insulating nitride film,
a second insulating nitride film provided over the acrylic film, and
a wiring provided over the second insulating nitride film;
wherein an inner wall face of a first opening portion formed in the acrylic film is covered by the second insulating nitride film, a bottom face of said first opening portion including a region in which the first insulating film and the second insulating film are brought into contact with each other over 0.3 through 3 μm;
wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;
wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion;
wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;
wherein a first part of an insulating film is formed over the pixel electrode; and
wherein the activation layer is formed over a second part of the insulating film.
5. The display device according to claim 1 , wherein said organic resin film is photosensitive organic resin film.
6. The display device according to claim 2 , wherein said organic resin film is a photosensitive organic resin film.
7. The display device according to claim 3 , wherein said acrylic film is a positive type photosensitive acrylic film.
8. The display device according to claim 4 , wherein said acrylic film is a positive type photosensitive acrylic film.
9. The display device according to claim 1 , wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.
10. The display device according to claim 2 , wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.
11. The display device according to claim 3 , wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.
12. The display device according to claim 4 , wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.
13. The display device according to claim 1 , wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μm.
14. The display device according to claim 2 , wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μm.
15. The display device according to claim 3 , wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μm.
16. The display device according to claim 4 , wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μm.
17. The display device according to claim 1 , wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μm.
18. The display device according to claim 2 , wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μm.
19. The display device according to claim 3 , wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 3 μm.
20. The display device according to claim 4 , wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μm.
21. The display device according to claim 1 , wherein a contact angle θ at a lower end portion of the first opening portion satisfies 30°<θ<65°.
22. The display device according to claim 2 , wherein a contact angle θ at a lower end portion of the first opening portion satisfies 30°<θ<65°.
23. The display device according to claim 3 , wherein a contact angle θ at a lower end portion of the first opening portion satisfies 30°<θ<65°.
24. The display device according to claim 4 , wherein a contact angle θ at a lower end portion of the first opening portion satisfies 30°<θ<65°.
25. An electronic device having the display device according to claim 1 , wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.
26. An electronic device having the display device according to claim 2 , wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.
27. An electronic device having the display device according to claim 3 , wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.
28. An electronic device having the display device according to claim 4 , wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.