System and method for making a LDMOS device with electrostatic discharge protection
A semiconductor device includes one or more LDMOS transistors and one of more SCR-LDMOS transistors. Each LDMOS transistor includes a LDMOS well of a first conductivity type, a LDMOS source region of a second conductivity type formed in the LDMOS well, and a LDMOS drain region of a second conductivity type separated from the LDMOS well by a LDMOS drift region of the second conductivity type. Each SCR-LDMOS transistor comprising a SCR-LDMOS well of the first conductivity type, a SCR-LDMOS source region of the second conductivity type formed in the SCR-LDMOS well, a SCR-LDMOS drain region of a second conductivity type, and a anode region of the first conductivity type between the SCR-LDMOS drain region and the SCR-LDMOS drift region. The anode region is separated from the SCR-LDMOS well by a SCR-LDMOS drift region of the second conductivity type.
1. A semiconductor device, comprising:
one or more lateral diffusion metal oxide semiconductor (LDMOS) transistors, each LDMOS transistor comprising a LDMOS well of a first conductivity type, a LDMOS source region of a second conductivity type formed in the LDMOS well, and a LDMOS drain region of the second conductivity type separated from the LDMOS well by a LDMOS drift region of the second conductivity type; and
one or more silicon controlled rectifier-lateral diffusion metal oxide semiconductor (SCR-LDMOS) transistors, each SCR-LDMOS transistor comprising a SCR-LDMOS well of the first conductivity type, a SCR-LDMOS source region of the second conductivity type formed in the SCR-LDMOS well, a SCR-LDMOS drain region of a second conductivity type and an anode region, wherein the anode region is between the SCR-LDMOS drain region and a SCR-LDMOS drift region,
wherein at least one of the SCR-LDMOS transistors and at least one of the LDMOS transistors share a common well of the first conductivity type.
2. The semiconductor device of claim 1 , wherein the first conductivity type is p-type and the second conductivity type is n-type.
3. The semiconductor device of claim 1 , wherein the first conductivity type is n-type and the second conductivity type is p-type.
4. The semiconductor device of claim 1 , wherein the LDMOS drift region is greater than the SCR-LDMOS drift region.
5. The semiconductor device of claim 1 , wherein the SCR-LDMOS transistors are about 5-10% of all transistors in the semiconductor device and the LDMOS transistors are about 90-95% of the transistors in the semiconductor device.
6. The semiconductor device of claim 1 , wherein the drain region and the anode region are formed in a well of the second conductivity type.