Composition for forming anti-reflective coating for use in lithography
There is provided a composition for forming anti-reflective coating for anti-reflective coating that has a good absorption of light at a wavelength utilized for manufacturing a semiconductor device, that exerts a high protection effect against light reflection, that has a high dry etching rate compared with the photoresist layer. Concretely, the composition for forming anti-reflective coating contains a triazine trione compound, oligomer compound or polymer compound having hydroxyalkyl structure as substituent on nitrogen atom.
1. A composition for forming anti-reflective coating characterized in that the composition comprises a triazine trione oligomer compound having hydroxyalkyl structure as substituent on nitrogen atom, or a triazine trione polymer compound having hydroxyalkyl structure as substituent on nitrogen atom; and wherein the triazine trione oligomer compound having hydroxyalkyl structure as substituent on nitrogen atom, or triazine trione polymer compound having hydroxyalkyl structure as substituent on nitrogen atom is a reaction product of a compound of formula (10) with a compound of formula (11) or (12):
wherein R 3 is C 1-6 alkyl, C 3-6 alkenyl, phenyl, benzyl or 2,3-epoxypropyl, R 4 and R 5 are C 1-6 alkyl, C 3-6 alkenyl, phenyl or benzyl, R 6 is C 1-6 alkyl, phenyl, benzyl or —(CH 2 ) n COOH, and n is a number of 1, 2 or 3.