Coagulation treatment apparatus
Provided are a coagulation treatment apparatus capable of removing fine objects of removal from a fluid containing the objects of removal, and a coagulation treatment method using the apparatus. A coagulation treatment apparatus for a fluid according to the present invention includes a production device for introducing ions of metal belonging to Group 8 of the periodic table into a fluid containing objects of removal and for producing a coagulated substance in which the objects of removal and the metal ions are bonded to each other. Moreover, a coagulation treatment apparatus of another embodiment includes: the production device for introducing ions of metal belonging to Group 8 of the periodic table into a fluid containing objects of removal and for producing a coagulated substance in which the objects of removal and the metal ions are bonded to each other; and the introduction device for coagulating the objects of removal by introducing the coagulated substance produced by the production device into the fluid.
1. A coagulation treatment apparatus for a fluid, comprising:
a tank housing a first fluid including silica;
a device introducing into the first fluid at least one metal belonging to Group 8 of the periodic table or ions of the metal that react with the silica to form a coagulate;
a pretreatment device concentrating the amount of silica in the first fluid prior to the tank housing the first fluid;
a path transporting the silica-concentrated first fluid from the pretreatment device to the tank;
a path transporting the coagulate to a separator; and
a path transporting a second fluid including silica to the separator for treating the second fluid including silica with the coagulate.
2. A coagulation treatment apparatus for a fluid, comprising:
a tank housing a first fluid including silica;
a device introducing into the first fluid at least one metal belonging to Group 8 of the periodic table or ions of the metal that react with at least a portion of the silica to form a coagulate;
a second device re-circulating back into the first fluid the coagulate that reacts with the remainder of the silica to form additional coagulate;
a pretreatment device concentrating the amount of silica in the first fluid prior to the tank housing the first fluid;
a path transporting the silica-concentrated first fluid from the pretreatment device to the tank;
a path transporting the coagulate and the additional coagulate to a separator; and
a path transporting a second fluid including silica to the separator for treating the second fluid including silica with the coagulate and the additional coagulate.
3. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , wherein the device is a pair of electrodes which are immersed in the first fluid and contain the metal belonging to Group 8 of the periodic table, and the ions of the metal are introduced while being eluted from the electrodes.
4. The coagulation treatment apparatus for a fluid according to claim 3 , wherein an amount of ions of the metal eluted from the electrodes is larger than an amount of ions that react with the silica.
5. The coagulation treatment apparatus for a fluid according to claim 3 , further comprising:
an addition device adding a substance exhibiting acidity into the first fluid,
wherein the substance is produced while switching polarities of the electrodes.
6. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , wherein at least a part of the ions is trivalent ions.
7. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , further comprising:
an oxidizer addition device for adding an oxidizer for oxidizing the ions.
8. The coagulation treatment apparatus for a fluid according to claim 7 , wherein the oxidizer is any of hydrogen peroxide and ozone.
9. The coagulation treatment apparatus for a fluid according to claim 7 , wherein an amount of the oxidizer to be added is controlled so as to mix the ions with the ions oxidized by the oxidizer.
10. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , further comprising:
an addition device for adding a substance exhibiting acidity into the first fluid.
11. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , further comprising:
an addition device for adding any of halogen ions and a compound containing halogen ions into the first fluid.
12. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , wherein the first and second fluids are wastewater resulting from a CMP process.
13. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , further comprising:
a filter separating the coagulate from the second fluid.
14. The coagulation treatment apparatus for a fluid according to claim 13 , wherein the filter comprises a polymer filter that passes the second fluid through and collects the coagulate on the surface of the polymer filter.
15. The coagulation treatment apparatus for a fluid according to claim 14 , further comprising:
a second filter that forms on the surface of the polymer filter from the collected coagulate and that passes the second fluid through.
16. The coagulation treatment apparatus for a fluid according to claim 2 , wherein the device is an addition device introducing the metal belonging to Group 8 of the periodic table or the ions of the metal.
17. The coagulation treatment apparatus for a fluid according to claim 2 , wherein the second device is a pump re-circulating the coagulate.
18. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , wherein the metal belonging to Group 8 of the periodic table is selected from the group consisting of iron, cobalt, nickel, and mixtures thereof.
19. The coagulation treatment apparatus for a fluid according to claim 1 or 2 ,
wherein the pretreatment device heats the first fluid to concentrate the amount of silica in the first fluid.
20. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , further comprising:
a filtration device filtrating the first fluid in the pretreatment device to concentrate the amount of silica in the first fluid.
21. The coagulation treatment apparatus for a fluid according to claim 1 or 2 , wherein the pretreatment device removes foreign substances from the first fluid prior to the tank housing the first fluid.