Semiconductor device with capacitor and method for fabricating the same
A method of fabricating a semiconductor device having a capacitor is provided. The method includes forming second, third, fourth, and fifth insulating layers on a first conductive layer formed in a first insulating layer. The fourth insulating layer is patterned into a first pattern before forming the fifth insulating layer thereupon. A capacitor and contact plug are formed by etching the fifth insulating layer to expose the first pattern; etching the third insulating layer using the exposed first pattern as a mask to expose the second insulating layer; exposing the first conductive layer at a capacitor region and contact plug region by etching the exposed second insulating layer; forming a second conductive layer on the exposed first conductive layer and sidewalls of the insulating layers; forming a dielectric on the second conductive layer in the capacitor region; and filling the capacitor and contact plug regions with a third conductive layer.
1. A method for manufacturing a semiconductor device, the method comprising the steps of:
forming a first insulating layer on a top surface of a semiconductor substrate;
etching the first insulating layer to form a trench;
depositing a first conductive layer on the insulating layer and filling the trench;
performing a first planarization process to expose a top surface of the first insulating layer while leaving the first conductive layer in the trench;
sequentially forming a second insulating layer, a third insulating layer, and a fourth insulating layer on the planarized first insulating layer;
etching the fourth insulating layer to form a first pattern for a contact plug area and a capacitor area of the first conductive layer;
depositing a fifth insulating layer on the fourth insulating layer having the first pattern and planarizing the fifth insulating layer;
forming a second pattern on the fifth insulating layer to expose the fifth insulating layer on the contact plug area and the capacitor area;
etching the exposed fifth insulating layer using the second pattern as a mask to expose the first pattern;
etching the third insulating layer using the first pattern as a mask to expose the second insulating layer;
etching the exposed second insulating layer to expose the first conductive layer in the contact plug area and the capacitor area;
forming a second conductive layer on the exposed first conductive layer and inner sidewalls of the exposed second, third, fourth, and fifth insulating layers;
forming a capacitor insulating layer on the second conductor formed in the capacitor area; and
forming a third conductive layer in the contact plug area and the capacitor area.
2. The method according to claim 1 , wherein the second conductive layer corresponds to a capacitor bottom electrode, and the third conductive layer formed in the capacitor area corresponds to a capacitor top electrode.
3. The method according to claim 1 , wherein the second conductive layer comprises tantalum nitride (TaN) or a multi-layer including tantalum nitride (TaN).
4. The method according to claim 1 , wherein the second conductive layer comprises titanium nitride (TiN) or a multi-layer including titanium nitride (TiN).
5. The method according to claim 1 , wherein the second conductive layer comprises tungsten nitride (WN) or a multi-layer including tungsten nitride (WN).
6. The method according to claim 1 , wherein the capacitor insulating layer comprises a nitride layer, TEOS (Tetraethoxysilane), tantalum based oxide, or aluminum based oxide.
7. The method according to claim 1 , wherein the second insulating layer and the fourth insulating layer are formed of the same material.
8. The method according to claim 1 , wherein the second insulating layer and the fourth insulating layer are formed of a nitride layer, SiC (silicon carbide), or aluminum oxide.
9. The method according to claim 7 , wherein the fourth insulating layer has a thickness larger than a thickness of the second insulating layer.
10. The method according to claim 1 , wherein etching the third insulating layer using the first pattern as a mask and etching the exposed second insulating layer forms a meander structure in the second and third insulating layers on the capacitor area of first conductive layer.
11. The method according to claim 1 , wherein etching the third insulating layer using the first pattern as a mask and etching the exposed second insulating layer forms a spiral structure in the second and third insulating layers on the capacitor area of the first conductive layer.