Methods and systems for creating a recipe for a defect review process

1. A computer-implemented method for creating a recipe for a defect review process, comprising:

determining an identity of a specimen on which the defect review process will be performed;

identifying inspection results for the specimen based on the identity, wherein the inspection results have been generated by a first tool;

determining if a recipe for the defect review process for a layer type of the specimen has been created based on the inspection results;

if the recipe for the layer type of the specimen has not been created, creating the recipe for the defect review process based on the inspection results without input from a user, wherein the defect review process will be performed by a second tool, and wherein the second tool comprises a defect review tool; and

storing the recipe such that the recipe can be used for additional specimens having a layer type that is the same as the layer type of the specimen on which the defect review process will be performed.

2. The method of claim 1 , wherein the method is automated.

3. The method of claim 1 , further comprising detecting when a carrier containing the specimen has been loaded into the defect review tool and performing the method after said detecting.

4. The method of claim 1 , wherein said determining the identity comprises reading a bar code on a carrier containing the specimen.

5. The method of claim 1 , wherein said creating comprises determining one or more parameters of the defect review process using the inspection results and a look up table.

6. The method of claim 1 , wherein the first tool comprises an optical inspection tool, and wherein the defect review tool comprises a scanning electron microscope.

7. The method of claim 1 , wherein the first tool comprises an electron beam based inspection tool, and wherein the defect review tool comprises a scanning electron microscope.

8. A storage medium comprising program instructions executable on a processor for performing a method for creating a recipe for a defect review process, the method comprising:

determining an identity of a specimen on which the defect review process will be performed;

identifying inspection results for the specimen based on the identity, wherein the inspection results have been generated by a first tool;

determining if a recipe for the defect review process for a layer type of the specimen has been created based on the inspection results;

if the recipe for the layer type of the specimen has not been created, creating the recipe for the defect review process based on the inspection results without input from a user, wherein the defect review process will be performed by a second tool, and wherein the second tool comprises a defect review tool; and

storing the recipe such that the recipe can be used for additional specimens having a layer type that is the same as the layer type of the specimen on which the defect review process will be performed.

9. A system configured to create a recipe for a defect review process, comprising:

a sensor configured to generate output responsive to an identity of a specimen on which the defect review process will be performed; and

a processor configured to determine the identity of the specimen using the output, to identify inspection results for the specimen based on the identity, to determine if a recipe for the defect review process for a layer type of the specimen has been created based on the inspection results, if the recipe for the layer type of the specimen has not been created, to create the recipe for the defect review process based on the inspection results without input from a user, and to store the recipe such that the recipe can be used for additional specimens having a layer type that is the same as the layer type of the specimen on which the defect review process will be performed, wherein the inspection results have been generated by a first tool, wherein the defect review process will be performed by a second tool, and wherein the second tool comprises a defect review tool.

10. The system of claim 9 , wherein the sensor is coupled to a load port of the defect review tool that will perform the defect review process.

11. The system of claim 9 , further comprising an additional sensor configured to detect when a carrier containing the specimen is positioned in a load port of the defect review tool, wherein the sensor is further configured to generate the output when the carrier is detected.

12. The system of claim 9 , wherein the sensor comprises a bar code reader.

13. The system of claim 9 , wherein the processor is coupled to a defect review subsystem such that the processor and the defect review subsystem are configured as the defect review tool.

14. The system of claim 9 , wherein the processor is further configured to access the inspection results from a database.

15. The system of claim 9 , wherein the first tool comprises an inspection tool, and wherein the processor is coupled to the inspection tool such that the processor can access the inspection results from the inspection tool.

16. The system of claim 9 , further comprising a storage medium comprising a look up table, wherein the look up table comprises parameters for the defect review process versus content of the inspection results.

17. The system of claim 9 , wherein the first tool comprises an optical inspection tool, and wherein the defect review tool that will perform the defect review process is configured as a scanning electron microscope.

18. The system of claim 9 , wherein the first tool comprises an electron beam based inspection tool, and wherein the defect review tool that will perform the defect review process is configured as a scanning electron microscope.