True color image by modified microlens array
View Patent ↗An image sensor array includes a substrate having at least three image sensors located therein. The image sensor array also includes a blue filter positioned proximate to the first image sensor; a green filter proximate to the second image sensor; and a red filter proximate to the third image sensor A first microlens is positionally arranged with the blue filter and the first image sensor; a second microlens is positionally arranged with the green filter and the second image sensor; and a third microlens is positionally arranged with the red filter and the third image sensor. The first microlens has a larger effective area than the second microlens, and the second microlens has a larger effective area than the third microlens.
1. A method for making an image sensor array, comprising:
providing a substrate having first, second, and third image sensors located therein;
forming first, second, and third filters proximate to the first, second, and third image sensors, respectively; and
forming first, second, and third microlenses aligned to the first, second, and third filters and first, second, and third image sensors, respectively;
wherein the first microlens has a larger effective area than the second microlens, wherein the second microlens has a larger effective area than the third microlens, wherein the first and second microlenses are adjacent each other, wherein the second microlens is next to the third microlens, and wherein there is a gap between the second and third microlenses, and
wherein at least one of the steps of forming the three microlenses includes utilizing optical proximity correction differently on first, second and third mask areas corresponding to the first, second, and third microlenses, respectively, and wherein the optical proximity correction is used to define the gap between the second and third microlenses.
2. The method of claim 1 wherein the first, second and third filters are configured to transmit blue, green, and red light, respectively.
3. The method of claim 1 wherein the steps of forming the three microlenses include utilizing a mask with different sized first, second and third areas corresponding to the first, second, and third microlenses, respectively.
4. The method of claim 3 further comprising:
determining a photo response ratio for the first, second, and third image sensors; and
sizing the third, second, and first mask areas according to the photo response ratio.
5. The method of claim 1 wherein there is no gap between the first and second microlenses.