Phase-change memory device
Disclosed is a phase-change memory device including a phase-change material pattern, a diffusion barrier layer, a bottom electrode and a top electrode. The phase-change material pattern is placed on the bottom electrode, and the diffusion barrier layer containing tellurium is placed on the phase-change material pattern. The top electrode containing titanium is placed on the diffusion barrier layer. The diffusion barrier layer acts to inhibit diffusion of titanium from the top electrode into the phase-change material pattern.
1. A phase-change memory device comprising:
a phase-change material pattern;
first and second electrodes providing an electrical signal to the phase-change material pattern; and
a diffusion barrier layer comprising tellurium and contacting the first electrode to thereby inhibiting atomic diffusion from the first electrode into the phase-change material pattern.
2. The phase-change memory device as set forth in claim 1 , wherein the first electrode comprises titanium.
3. The phase-change memory device as set forth in claim 2 , wherein the diffusion barrier layer contacts with at least one of the top and bottom of the first electrode.
4. The phase-change memory device as set forth in claim 2 , wherein the diffusion barrier layer comprises TiTe 2 .
5. A phase-change memory device comprising:
a bottom electrode in a semiconductor substrate;
a phase-change material pattern on the bottom electrode;
a first diffusion barrier layer comprising tellurium on the phase-change material pattern; and
a top electrode comprising titanium on the first diffusion barrier layer,
wherein the first diffusion barrier layer inhibits diffusion of titanium from the top electrode into the phase-change material pattern.
6. The phase-change memory device as set forth in claim 5 , further comprising a second diffusion barrier layer comprising tellurium on the top electrode.
7. The phase-change memory device as set forth in claim 6 , wherein the first and second diffusion barrier layers comprise TiTe 2 .
8. The phase-change memory device as set forth in claim 6 , wherein the second diffusion barrier layer covers sidewalls of the top electrode and the phase-change material pattern.
9. The phase-change memory device as set forth in claim 5 , further comprising a passivation layer covering a sidewall of the phase-change material pattern.
10. A phase-change memory device comprising:
a bottom electrode in a semiconductor substrate;
a phase-change material pattern on the bottom electrode;
a top electrode comprising titanium on the phase-change material pattern; and
a diffusion barrier layer comprising tellurium on the top electrode, wherein the diffusion barrier layer inhibits diffusion of titanium from the top electrode into the phase-change material pattern.
11. The phase-change memory device as set forth in claim 10 , wherein the diffusion barrier layer includes TiTe 2 .
12. The phase-change memory device as set forth in claim 10 , wherein the diffusion barrier layer covers sidewalls of the top electrode and the phase-change material pattern.
13. The phase-change memory device as set forth in claim 10 , further comprising a passivation layer covering a sidewall of the phase-change material pattern.