Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
A position measurement device 29 measures the position of a position measurement mark 26 formed on the lower surface of a reticle 1 , thereby measuring the position of the reticle 1 . A position measurement device 30 measures the position of the position measurement mark 27 formed on the lower surface of a lower lid 2 b , thereby measuring the position of the lower lid 2 b . The relative displacement of the reticle 1 and lower lid 2 b is known when the position of the reticle 1 and the position of the lower lid 2 b are known. Therefore, when the lower lid 2 b having the reticle 1 loaded thereon is carried with a carrying device and set in an exposure device, the stop position of the lower lid 2 b is determined by taking this displacement into account. As a result, the reticle 1 can be correctly set in the exposure device.
1. A reticle protection member for protecting at least part of a reticle to be used in an exposure device, the reticle protection member comprising an alignment mark indicating the position of the reticle protection member.
2. The reticle protection member as described in claim 1 , wherein the reticle is a reflective-type reticle having a pattern on one surface, wherein the reticle protection member comprises a first member for protecting the surface of the reticle having the pattern and a second member for protecting a surface opposite to the surface having the pattern, and wherein the first and second members each include an alignment mark.
3. The reticle protection member as described in claim 1 , wherein the reticle is a reflective-type reticle having a pattern on one surface, and wherein the reticle protection member protects at least the pattern.
4. A reticle carrying device for carrying a reticle, comprising reticle-carrying means for carrying a reticle at least partly protected by a reticle protection member, first position measurement means for measuring the position of the reticle, and second position measurement means for measuring the position of the reticle protection member.
5. The reticle carrying device according to claim 4 , wherein the reticle is a reflective-type reticle having a pattern on one surface, wherein the reticle protection member comprises a first member for protecting the surface of the reticle having the pattern and a second member for protecting a surface opposite to the surface having the pattern, and wherein the second position measurement means independently measures the positions of the first member and the second member.
6. The reticle carrying device according to claim 5 , further comprising position correction means for correcting the positions of the first member and the reticle based on the position of the reticle and the position of the reticle protection member measured by the first position measurement means and the second position measurement means.
7. The reticle carrying device according to claim 6 , wherein the reticle carrying means is configured to carry the reticle protected by the reticle protection member to a reticle stage and to carry the reticle protection member from the reticle stage to another location after the reticle has been loaded on the reticle stage, and is configured to correct the position of the reticle and the reticle protection member or the first member with the position correction means before the reticle is loaded on the reticle stage.
8. The reticle carrying device according to claim 5 , having a function of measuring the positions of the first member and the second member and then aligning the first member and the second member and combining them based on the measurement results.
9. The reticle carrying device according to claim 4 , wherein the reticle is a reflective-type reticle having a pattern on one surface, and wherein the reticle protection member protects at least the pattern.
10. The reticle carrying device according to claim 4 , further comprising position correction means for correcting the positions of the reticle protection member and the reticle based on the position of the reticle and the position of the reticle protection member measured by the first position measurement means and the second position measurement means.
11. The reticle carrying device according to claim 10 , wherein the reticle carrying means is configured to carry the reticle protected by the reticle protection member to a reticle stage and to carry the reticle protection member from the reticle stage to another location after the reticle has been loaded on the reticle stage, and is configured to correct the position of the reticle and the reticle protection member or the first member with the position correction means before the reticle is loaded on the reticle stage.
12. The reticle carrying device according to claim 4 , wherein the reticle carrying means is configured to carry the reticle protection member to a reticle stage, protecting the reticle with the reticle protection member, and then to carry the reticle protection member and the reticle to recover the reticle from the reticle stage, and is configured to measure the position of the reticle protection member with the second measurement means before the reticle protection member is carried to the reticle stage.
13. An exposure device comprising the reticle-carrying device of claim 4 .
14. A method for carrying a reticle to be used in an exposure device, comprising the steps of:
protecting at least part of the reticle with a protection member;
measuring the position of the reticle and the position of protection member while the protection member protects at least part of the reticle; and
removing the reticle from the protection member.