Semiconductor device with extraction electrode
First and second connection electrodes are formed separately to be opposed to each other on an emitter electrode of an IGBT. Other first and second connection electrodes are formed separately to be opposed to each other on an anode electrode of a diode. A first electrode interconnection part extends from one side portion of an extraction electrode and is bent inwardly. A second electrode interconnection part extends from the other side portion to be opposed to the first electrode interconnection part. The first and second electrode interconnection parts located to face the IGBT are soldered only to the first and second connection electrodes, respectively. Similarly, the first and second electrode interconnection parts located to be opposed to the diode are soldered only to the other first and second connection electrodes, respectively.
1. A semiconductor device comprising:
a power semiconductor element comprising first and second main electrodes respectively formed on a front surface and a rear surface thereof;
a metal plate electrically connected to said second main electrode of said power semiconductor element;
first and second connection electrodes formed separately on said first main electrode to be opposed to each other; and
an extraction electrode comprising a first electrode interconnection part formed to extend downwardly from one side portion of said extraction electrode, and a second electrode interconnection part separted from said first electrode interconnection part and formed to extend downwardly from another side portion of said extraction electrode opposed to said one side portion so as to be separated from and opposed to said first electrode interconnection part, wherein
said first electrode interconnection part is electrically connected only to said first connection electrode, and
said second electrode interconnection part is electrically connected only to said second connection electrode.
2. The semiconductor device according to claim 1 , wherein said first and second connection electrodes both extend in a first direction, said extraction electrode extends in a second direction being perpendicular to said first direction, and
said first and second connection electrodes are each divided in said second direction.
3. The semiconductor device according to claim 2 , wherein
said first and second electrode interconnection parts are both bent inwardly and are opposed to each other.
4. The semiconductor device according to claim 2 , wherein
said first main electrode is divided into two in a region between said first and second connection electrodes, and a dividing region in which said first main electrode is not present is formed on said front surface of said power semiconductor element between said first and second connection electrodes, and
a temperature sensor configured to monitor a temperature of said power semiconductor element is formed on said dividing region.
5. The semiconductor device according to claim 4 , wherein
said temperature sensor is provided in a central portion of said front surface of said power semiconductor element.
6. A method of manufacturing a semiconductor device comprising the steps of:
by using a power semiconductor element comprising a first main electrode including thereon first and second connection electrodes formed separately to be opposed to each other and a second main electrode opposed to said first main electrode, electrically connecting said second main electrode to a surface of a metal plate; and
by using an extraction electrode comprising a first electrode interconnection part extending downwardly from one side portion of said extraction electrode and a second electrode interconnection part extending downwardly from another side portion of said extraction electrode opposed to said one side portion and being separated from said first electrode interconnection part to be opposed to said first electrode interconnection part, electrically connecting said first electrode interconnection part only to said first connection electrode and electrically connecting said second electrode interconnection part only to said second connection electrode.