IP Library › Granted Patent US 7,508,974
Granted Patent B2
US 7,508,974 · App. 11/069,758 · Granted Mar 24, 2009

Electronic component products and method of manufacturing electronic component products

Assignee: Scanner Technologies Corporation
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Quick Facts
Patent No.
US 7,508,974
App. No.
11/069,758
Granted
Mar 24, 2009
Kind
B2
Abstract

A calibration and part inspection method for the inspection of ball grid array, BGA, devices. Two cameras image a precision pattern mask with dot patterns deposited on a transparent reticle. The precision pattern mask is used for calibration of the system. A light source and overhead light reflective diffuser provide illumination. A first camera images the reticle precision pattern mask from directly below. An additional mirror or prism located below the bottom plane of the reticle reflects the reticle pattern mask from a side view, through prisms or reflective surfaces, into a second camera and a second additional mirror or prism located below the bottom plane of the reticle reflects the opposite side view of the reticle pattern mask through prisms or mirrors into a second camera. By imaging more than one dot pattern the missing state values of the system can be resolved using a trigonometric solution. The reticle with the pattern mask is removed after calibration and the BGA to be inspected is placed with the balls facing downward, in such a manner as to be imaged by the two cameras. The scene of the part can thus be triangulated and the dimensions of the BGA are determined.

Claims (56)

1. A method of manufacturing a ball array device, the method comprising:

making a three dimensional inspection of a lead on the ball array device with the ball array device being positioned in a fixed optical system; and

selecting the ball array device as a produced ball array device based upon the results of the three dimensional inspection;

wherein the three dimensional inspection comprises:

illuminating the ball array device;

taking a first image of the ball array device with a first camera disposed in a fixed focus position relative to the ball array device to obtain a characteristic circular doughnut shape image from at least one ball;

taking a second image of the ball array device with a second camera disposed in a fixed focus position relative to the ball array device to obtain a side view image of the at least one ball; and

processing the first image and the second image using a triangulation method to calculate a three dimensional position of the at least one ball with reference to a pre-calculated calibration plane.

2. The method of manufacturing of claim 1 , wherein the second image comprises a segment having a crescent shape.

3. The method of manufacturing of claim 1 , wherein the calibration plane comprises a coordinate system having X, Y and Z axes and wherein an X measurement value is proportional to a Z measurement value.

4. The method of manufacturing of claim 1 , wherein the triangulation method to calculate a three dimensional position of the at least one ball is based on determining a center of the ball in the first image and determining a ball top location in the second image.

5. The method of manufacturing of claim 1 , wherein the pre-calculated calibration plane is defined through measuring a calibration pattern.

6. The method of manufacturing of claim 1 , wherein the taking a second image further comprises interposing a mirror between the ball array device and the second camera.

7. The method of manufacturing of claim 1 , wherein the second image is obtained at a low angle of view.

8. The method of manufacturing of claim 1 , wherein the first camera and the second camera are fixed at different angles relative to the calibration plane.

9. The method of manufacturing of claim 1 , wherein the processing measurements from the first image and the second image comprises employing grayscale edge detection to locate ball positions.

10. The method of manufacturing of claim 1 , wherein the illuminating the ball array device comprises employing diffuse illumination.

11. The method of manufacturing of claim 1 , wherein the ball array device comprises a ball grid array device.

12. The method of manufacturing of claim 1 , wherein the ball array device comprises a bump on wafer device.

13. The method of manufacturing of claim 1 , wherein illuminating is achieved using a single light source.

14. The method of manufacturing of claim 1 , wherein illuminating is achieved using more than one light source.

15. The method of manufacturing of claim 14 , wherein the more than one light sources used are spectrally diverse from one another.

16. A method of manufacturing a ball array device, the method comprising:

making a three dimensional inspection of a lead on the ball array device with the ball array device being positioned in an optical system; and

selecting the ball array device as a produced ball array device based upon the results of the three dimensional inspection;

wherein the three dimensional inspection comprises:

illuminating the ball array device to produce reflections;

taking a first image of the reflections with a first camera disposed in a first fixed position to obtain a circular doughnut shape image of the ball array device;

taking a second image of the reflections with a second camera disposed in a second fixed position non-parallel to the first fixed position to obtain a side view of the ball array device; and

processing measurements from the first image and the second image to calculate a three dimensional position of at least one ball using a triangulation method with reference to a pre-calculated calibration plane.

17. The method of manufacturing of claim 16 , wherein the second image comprises a segment having a crescent shape.

18. The method of manufacturing of claim 16 , wherein the calibration plane comprises a coordinate system having X, Y and Z axes and wherein an X measurement value is proportional to a Z measurement value.

19. The method of manufacturing of claim 16 , wherein the pre-calculated calibration plane is defined through measuring a calibration pattern.

20. The method of manufacturing of claim 16 , wherein the taking a second image further comprises interposing a mirror between the ball array device and the second camera.

21. The method of manufacturing of claim 16 , wherein the processing measurements from the first image and the second image comprises employing grayscale edge detection to locate ball positions.

22. The method of manufacturing of claim 16 , wherein the processing measurements from the first image and the second image comprises employing grayscale edge detection to locate ball positions.

23. The method of manufacturing of claim 16 , wherein the illuminating the ball array device comprises employing diffuse illumination.

24. The method of manufacturing of claim 16 , wherein the ball array device comprises a ball grid array device.

25. The method of manufacturing of claim 16 , wherein the ball array device comprises a bump on wafer device.

26. The method of manufacturing of claim 16 , wherein illuminating is achieved using a single light source.

27. The method of manufacturing of claim 16 , wherein illuminating is achieved using more than one light source.

28. The method of manufacturing of claim 27 , wherein the more than one light sources used are spectrally diverse from one another.

29. A method of manufacturing a ball array device, the method comprising:

making a three dimensional inspection of a lead on the ball array device with the ball array device being positioned in an optical system; and

selecting the ball array device as a produced ball array device based upon the results of the three dimensional inspection;

wherein the three dimensional inspection comprises:

illuminating the ball array device;

taking a first image of the ball array device with a first camera disposed in a first fixed position relative to the ball array device to obtain a circular doughnut shape view of the ball array device, wherein the first camera includes a charged coupled device array;

taking a second image of the ball array device with a second camera disposed in a second fixed position non-parallel to the first fixed position to obtain a side view of the ball array device, wherein a fixed mirror is interposed to reflect light between the ball array device and the second camera, and wherein the second camera includes a charged coupled device array; and

processing measurements from the first image and the second image to calculate a three dimensional position of at least one ball using a triangulation method with reference to a pre-calculated calibration plane, wherein the calibration plane comprises a coordinate system having X, Y and Z axes, and wherein an X measurement value is proportional to a Z measurement value.

30. The method of manufacturing of claim 29 , wherein the second image comprises a segment having a crescent shape.

31. The method of manufacturing of claim 29 , wherein the pre-calculated calibration plane is defined through measuring a calibration pattern.

32. The method of manufacturing of claim 29 , wherein the processing measurements from the first image and the second image comprises employing grayscale edge detection to locate ball positions.

33. The method of manufacturing of claim 29 , wherein the illuminating the ball array device comprises employing diffuse illumination.

34. The method of manufacturing of claim 29 , wherein the ball array device comprises a ball grid array device.

35. The method of manufacturing of claim 29 , wherein the ball array device comprises a bump on wafer device.

Assignments (3)
SECURITY AGREEMENT Recorded Oct 29, 2007
From: SCANNER TECHNOLOGIES CORPORATION
To: MORK, DAVID P.; BEATY, ELWIN M.
Reel/Frame 020031/0478 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 17, 2006
From: BEATY, ELWIN M.
To: SCANNER TECHNOLOGIES CORPORATION
Reel/Frame 017344/0751 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 17, 2006
From: MORK, DAVID P.
To: SCANNER TECHNOLOGIES CORPORATION
Reel/Frame 017344/0782 →
Continuity (3)
Continuation 0935189200 · Jul 13, 1999
Continuation In Part 0900824300 · Jan 16, 1998
Related Publication 20050189657A1 · Sep 1, 2005