Floating-body dynamic random access memory and method of fabrication in tri-gate technology
A floating-body dynamic random access memory device may include a semiconductor body having a top surface and laterally opposite sidewalls formed on a substrate. A gate dielectric layer may be formed on the top surface of the semiconductor body and on the laterally opposite sidewalls of the semiconductor body. A gate electrode may be formed on the gate dielectric on the top surface of the semiconductor body and adjacent to the gate dielectric on the laterally opposite sidewalls of the semiconductor body. The gate electrode may only partially deplete a region of the semiconductor body, and the partially depleted region may be used as a storage node for logic states.
1. A transistor, comprising:
two ore more silicon bodies each having:
a dielectric formed around the body,
an electrode formed around the dielectric, the electrodes from the two or more bodies forming a common electrode;
a source region on a first side of its electrode, and
a drain region on a second side of its electrode, the source regions being part of a common source and the drain regions being part of a common drain, wherein the bodies are partially depletable to create a storage node.
2. The transistor of claim 1 , wherein the common electrode length is about equal to the heights of the silicon bodies.
3. The transistor of claim 1 , wherein the silicon bodies include a single crystalline silicon film.
4. The transistor of claim 1 , wherein the common electrode length is approximately equal to the width of at least one of the silicon bodies.
5. The transistor of claim 1 , wherein the common electrode length is approximately equal to the thickness of at least one of the silicon bodies.
6. The transistor of claim 1 , wherein each semiconductor body is formed with the same width and height.
7. The transistor of claim 1 , wherein at least one silicon body has a pair of sidewall spacers formed along opposite sidewalls of its electrode.
8. The transistor of claim 1 , wherein the common electrode is a unitary electrode formed from the two or more body electrodes.
9. The transistor of claim 1 , wherein the two or more bodies next and parallel to one another.
10. The transistor of claim 1 , wherein the source regions are connected together to form the common source.