Container and exposure apparatus having the same
A container including at least two structural members welded to each other to define an inside space, and a material containing an organic compound provided in the inside space, in which in at least one structural member of the at least two structural members has (i) a groove formed between a welded portion thereof and the material in order to release the organic compound, as the organic compound is vaporized when the structural members are welded to each other, and (ii) a communication member to communicate the groove and an outside space of the container with each other, so that the vaporized organic compound is exhausted to the outside space.
1. A container comprising:
at least two structural members welded to each other to define an inside space; and
a material containing an organic compound provided in the inside space,
wherein at least one structural member of said at least two structural members has (i) a groove formed between a welded portion thereof and the material and configured to release the organic compound, as the organic compound is vaporized when the structural members are welded to each other, and (ii) a communication member configured to communicate the groove and an outside space of said container with each other, so that the vaporized organic compound is exhausted to the outside space.
2. A container according to claim 1 , wherein said at least two structural members have a lid and a container body with an opening, and wherein the welded portion is defined along an outer periphery of the opening and at a plane at which the lid and the container body are opposed to each other.
3. A container according to claim 2 , wherein said groove and said communication member are provided in the lid.
4. A container according to claim 2 , wherein said groove and said communication member are provided in the container body.
5. A container according to claim 4 , wherein said groove is comprised of a recess formed at a surface where the lid and the container body are opposed to each other, the recess extending along the outer periphery of the opening.
6. A container according to claim 1 , wherein said communicating member includes a seal member.
7. A container according to claim 1 , further comprising a flowpassage for producing a flow of a cooling medium between the sealing material and the welded portion.
8. A container according to claim 1 , further comprising a leakage check tube connected to said communication member.
9. An exposure apparatus comprising:
(A) a vacuum chamber for performing an exposure process therein; and
(B) at least one structural member to be disposed in said vacuum chamber, wherein said at least one structural member is provided in a container, which comprises:
(a) at least two structural members welded to each other to define an inside space; and
(b) a material containing an organic compound provided in the inside space,
wherein at least one structural member of said at least two structural members has (i) a groove formed between a welded portion thereof and the material and configured to release the organic compound as the organic compound is vaporized when the structural members are welded to each other, and (ii) a communication member configured to communicate the groove and an outside space of said container with each other, so that the vaporized organic compound is exhausted to the outside space.
10. An exposure apparatus according to claim 9 , wherein said at least one structural member is a portion of a linear motor.
11. A device manufacturing method, comprising the steps of:
exposing an object to be exposed, by use of an exposure apparatus as recited in claim 9 ; and
developing the exposed object.