Temporary wafer bonding method for semiconductor processing

1. A method comprising:

(1) forming a film by applying an addition reaction curable adhesive composition to a first substrate, where the addition reaction curable composition is a hydrosilylation reaction curable composition comprising:

(A) a polyorganosiloxane containing an average of at least two silicon- bonded unsaturated organic groups per molecule,

(B) an organosilicon compound containing an average of at least two silicon-bonded hydrogen atoms per molecule in an amount sufficient to cure the composition,

(C) a catalytic amount of a hydrosilylation catalyst,

optionally (D) a solvent,

optionally (E) an inhibitor,

optionally (F) a filler,

optionally (G) a treating agent,

optionally (H) a spacer,

optionally (I) an adhesion promoter,

optionally (J) a surfactant, and

optionally (K) a colorant;

optionally (2) heating the product of step (1),

(3) applying a second substrate to the film, where at least one of the first substrate and the second substrate is a semiconductor wafer,

(4) curing the film to form a cured film,

(5) processing the semiconductor wafer, and

(6) removing the cured film with an etching solution.

2. The method of claim 1 , where step (1) is performed by a technique selected from spin coating, spray coating, dipping, or printing.

3. The method of claim 1 , where component (A) is an alkenyl- functional polyorganosiloxane resin.

4. The method of claim 1 , where component (B) is an organohydrogenpolysiloxane containing an average of at least two silicon bonded hydrogen atoms per molecule.

5. The method of claim 1 , where component (C) is platinum acetylacetonate.

6. The method of claim 1 , where component (D) is mesitylene.

7. The method of claim 1 , where the first substrate is a first semiconductor wafer and the second substrate is a second semiconductor wafer.

8. The method of claim 1 , where component (D) is present, and step (2) is performed by heating at a temperature of 50 to 120° C. for up to 5 minutes to remove component (D).

9. The method of claim 1 , where step (4) is performed by heating at a temperature of 150 to 250 0C for 30 to 120 minutes.

10. The method of claim 1 , where the etching solution comprises an organic solvent containing an acid or a base capable of dissolving the film.

11. The method of claim 1 , where step (6) is performed by immersion.

12. The method of claim 8 , where step (2) further comprises heating at a temperature of up to 200° C. for 1 to 30 minutes to partially cure the film.

13. The method of claim 10 , where the organic solvent is selected from the group consisting of a monohydric alcohol, a dihydric alcohol, a monoether, a diether, a polar aprotic solvent, and a combination thereof.

14. The method of claim 10 , where the etching solution further comprises an amount of water less than or equal to 3% by weight of the etching solution.

15. The method of claim 10 , where the etching solution is anhydrous.

16. The method of claim 10 , where the base is selected from the group consisting of ammonium hydroxide, cesium hydroxide, potassium hydroxide, sodium hydroxide, and a combination thereof.

17. The method of claim 10 , where the base is selected from the group consisting of phosphazene, a tetraalkyl ammonium hydroxide, a combination thereof.

18. The method of claim 10 , where the acid is selected from the group consisting of hydrochloric acid, hydrofluoric acid, nitric acid, sulfuric acid, and a combination thereof.

19. The method of claim 10 , where the acid comprises an organosulfonic acid.