Method and device for observing a specimen in a field of view of an electron microscope
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.
1. A method of observing a specimen in a field of view of an electron microscope comprising the acts of:
setting the magnification of said electron microscope;
setting conditions for moving said field of view;
setting a starting position for said field of view;
moving said field of view based upon said condition;
illuminating said specimen with an electron beam having a first angle and forming a first transmission image of said specimen in said field of view;
adjusting said electron beam to a second angle and forming a second transmission image of said specimen in said field of view; and
calculating a degree of coincidence between said first and second transmission images.