Diaphragm air pump

1. A diaphragm air pump comprising:

a pump chamber, wherein fluid flows into the pump chamber and then flows out of the pump chamber;

a diaphragm provided within the pump chamber, wherein the diaphragm comprises one or more central openings and one or more central check valves in the central openings; and

one or more piezoelectric beams each connected to one side of the diaphragm, wherein electric power is applied to the piezoelectric beams and the fluid is supplied to a part-to-be-cooled as the piezoelectric beams vibrate;

wherein the diaphragm is connected to the pump chamber by the one or more piezoelectric beams.

2. The diaphragm air pump according to claim 1 , wherein the pump chamber comprises:

an upper case comprising one or more inlet openings, through which the fluid flows into the upper case; and

a lower case comprising one or more outlet openings, through which the fluid having flown into the upper case flows out of the lower case after contacting with the part-to-be-cooled.

3. The diaphragm air pump according to claim 2 , wherein the inlet openings are provided with inlet check valves for controlling external fluid to flow into the upper case.

4. The diaphragm air pump according to claim 3 , wherein the diaphragm is disposed between the upper case and the lower case, and the central check valves are operable to control the fluid in the upper case to flow into the lower case.

5. The diaphragm air pump according to claim 3 , wherein the diaphragm is bonded with parts of the piezoelectric beams, but not fixed to the lower case of the pump chamber.

6. The diaphragm air pump according to claim 2 , wherein the lower case comprises slots for installing the piezoelectric beams.

7. The diaphragm air pump according to claim 6 , wherein two slots and two piezoelectric beams are provided.

8. The diaphragm air pump according to claim 7 , wherein one side of the two piezoelectric beams is fixed to the lower case of the pump chamber respectively.

9. The diaphragm air pump according to claim 7 , wherein the two piezoelectric beams comprise bimorphs.

10. The diaphragm air pump according to claim 2 , wherein the inlet openings are disposed in the top of the upper case.

11. The diaphragm air pump according to claim 2 , wherein the outlet openings are disposed in sidewalls of the lower case.

12. The diaphragm air pump according to claim 2 , wherein sidewalls of the upper case comprise lateral openings, in which lateral check valves are installed in the lateral openings.

13. The diaphragm air pump according to claim 2 , wherein the inlet openings and the outlet openings comprise diffusers.

14. The diaphragm air pump according to claim 1 , wherein the one or more piezoelectric beams comprises at least two piezoelectric beams, wherein the diaphragm is connected to the pump chamber by one of the piezoelectric beams and by another of the piezoelectric beams, such that the diaphragm is not directly connected to the pump chamber, and the one of the piezoelectric beams and the other of the piezoelectric beams are connected to the pump chamber at opposite sides of the diaphragm.

15. The diaphragm air pump according to claim 1 , wherein

the pump chamber further comprises sidewalls;

the diaphragm further comprises an upper surface, a lower surface a central portion and sides;

the central portion is provided between the sides;

the one or more central openings and one or more central check valves in the central openings are provided in the central portion; and

the central openings extend from the upper surface to the lower surface.