Ferroelectric film, method of manufacturing ferroelectric film, ferroelectric capacitor, and ferroelectric memory
A ferroelectric film having a ferroelectric shown by a general formula (Pb 1-d Bi d )(B 1-a X a )O 3 , B including at least one of Zr and Ti, X including at least one of Nb and Ta, “a” being in a range of “0.05≦a≦0.4”, and “d” being in a range of “0<d<1”.
1. A method of manufacturing a ferroelectric film including a ferroelectric shown by a general formula (Pb 1-d Bi d )(B 1-a X a )O 3 ,
B including at least one of Zr and Ti;
X including at least one of Nb and Ta;
“a” being in a range of “0.05≦a≦0.4”;
“d” being in a range of “0<d<1”; and
the method comprising:
mixing a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide containing at least Zr and Ti, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent; and
forming a ferroelectric precursor solution including an ester bond by esterification of the polycarboxylic acid or a polycarboxylic acid derived from the polycarboxylic acid ester and the metal alkoxide.
2. The method of manufacturing a ferroelectric film as defined in claim 1 ,
the ferroelectric film further including a crystal of BiNbO 4 , and
the method comprising:
mixing a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide containing at least Zr and Ti, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent; and
forming a ferroelectric precursor solution including an ester bond by esterification of the polycarboxylic acid or a polycarboxylic acid derived from the polycarboxylic acid ester and the metal alkoxide.
3. The method of manufacturing a ferroelectric film as defined in claim 1 , comprising:
mixing a sol-gel raw material including a bismuth carboxylate when mixing the sol-gel raw material, the polycarboxylic acid or the polycarboxylic acid ester, and the organic solvent.
4. The method of manufacturing a ferroelectric film as defined in claim 1 , comprising:
mixing a sol-gel raw material including a lead carboxylate when mixing the sol-gel raw material, the polycarboxylic acid or the polycarboxylic acid ester, and the organic solvent.
5. The method of manufacturing a ferroelectric film as defined in claim 1 ,
wherein the polycarboxylic acid or the polycarboxylic acid ester is a dicarboxylic acid or a dicarboxylic acid ester.
6. The method of manufacturing a ferroelectric film as defined in claim 1 , comprising:
mixing a sol-gel raw material including Si or Si and Ge when mixing the sol-gel raw material, the polycarboxylic acid or the polycarboxylic acid ester, and the organic solvent.
7. A method of manufacturing a ferroelectric film including a ferroelectric shown by a general formula (Pb 1-d Bi d )(B 1-a X a )O 3 ,
B including at least one of Zr and Ti;
X including at least one of Nb and Ta;
“a” being in a range of “0.05≦a≦0.4”;
“d” being in a range of “0<d<1”; and
the method comprising:
mixing a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide containing at least Zr and Ti, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent;
forming a ferroelectric precursor solution including an ester bond by esterification of the polycarboxylic acid or a polycarboxylic acid derived from the polycarboxylic acid ester and the metal alkoxide; and
crystallizing the precursor solution.