Method for manufacturing a magnetic write head for perpendicular magnetic data recording
View Patent ↗A method for manufacturing a magnetic write head for perpendicular magnetic recording having a write pole with a very narrow track width and well controlled critical dimensions. The write pole is formed by depositing an electrically conductive seed layer over a substrate, and then depositing a photo resist layer over the seed layer. The photo resist layer is photolithographically exposed and developed to form an opening or trench in the photoreist layer, the opening defining the pattern of the write pole. A magnetic material is then plated into the opening in the photoresist layer. The photo resist layer can then be removed by a chemical lift off, and portions of the seed layer that are not covered by the write pole can be removed by ion milling.
1. A method for manufacturing a magnetic write head for perpendicular magnetic data recording, the method comprising:
providing a substrate;
depositing an electrically conductive seed layer over the substrate;
depositing a photo resist material;
photolithographically exposing and developing the photo resist material to form an opening in the photo resist material;
depositing a chemical shrink material;
baking the photoresist material to cause a portion of the shrink material to bond with the photo resist material;
blanket exposing the photo resist to generate acid for increasing bonding between the chemical shrink material and the photo resist;
removing an un-bonded portion of the chemical shrink material leaving the portion of the chemical shrink material that has bonded to the photo resist material; and
electroplating a magnetic material into the opening in the photo resist material to from a write pole.
2. The method as in claim 1 further comprising, after electroplating the magnetic material into the opening in the photo resist material:
removing the photo resist material and chemical shrink material; and
performing an ion mill to remove portions of the seed layer that are not covered by the write pole.
3. The method as in claim 1 wherein the photo resist is a fixed angle photo resist and wherein the exposing and developing produces an opening in the photo resist that has a side wall that defines an angle of 78 to 82 degrees with respect to the substrate.
4. The method as in claim 1 wherein the electrically conductive seed layer is non-magnetic.
5. The method as in claim 1 wherein the electrically conductive seed layer comprises Rh.
6. A method for manufacturing a magnetic write head for perpendicular magnetic data recording, the method comprising:
providing a substrate;
depositing an electrically conductive seed layer over the substrate;
depositing a photo resist material:
photolithographically exposing and developing the photo resist material to form an opening in the photo resist material;
depositing a chemical shrink material;
baking the photoresist material to cause a portion of the shrink material to bond with the photo resist material;
removing an un-bonded portion of the chemical shrink material leaving the portion of the chemical shrink material that has bonded to the photo resist material; and
electroplating a magnetic material into the opening in the photo resist material to from a write pole;
wherein the removing an un-bonded portion of the chemical shrink material comprises rinsing in water.