Methods of forming semiconductor structures and systems for forming semiconductor structures
View Patent ↗A method and system for forming a semiconductor structure includes forming at least one material layer over a substrate. At least one portion of the material layer is etched with at least one first precursor, thereby defining at least one material pattern. Charges attached to the material pattern are removed with at least one discharge gas.
1. A method for forming a semiconductor structure, comprising:
forming a gate dielectric layer over a substrate;
forming a polysilicon layer over the gate dielectric layer;
etching at least one first portion of the polysilicon layer with at least one first precursor, thereby defining at least one gate pattern;
etching at least one second portion of the gate dielectric layer with at least one second precursor, the second precursor mixed with a first carrier gas in a first ratio of carrier gas to precursor;
removing charges of the gate pattern with at least one discharge gas; and
etching at least one third portion of the gate dielectric layer with at least one third precursor, the third precursor mixed with a second carrier gas in a second ratio of carrier gas to precursor, the second ratio greater than the first ratio.
2. The method of claim 1 , wherein at least one of the first precursor and the second precursor comprises at least one of chlorine gas (Cl 2 ), hydrogen bromide (HBr) and carbon fluoride (CF 4 ) and at least one of helium (He), oxygen gas (O 2 ) and nitrogen gas (N 2 ).
3. The method of claim 1 , wherein the discharge gas comprises at least one of helium (He), oxygen gas (O 2 ), argon (Ar) and nitrogen (N 2 ).
4. The method of claim 3 , wherein the charge-removing step comprises a pressure between about 10 milliTorr (mT) and about 100 mT, a source power between about 100 Watts and about 500 Watts, a gas flow rate between about 50 standard cubic centimeters per minute (sccm) and about 200 sccm, and a processing time between about 1 second and about 50 seconds.
5. The method of claim 1 , wherein the third precursor comprises at least one of chlorine gas (Cl 2 ), hydrogen bromide (HBr) and carbon fluoride (CF 4 ) and at least one of helium (He), oxygen gas (O 2 ) and nitrogen gas (N 2 ).
6. The method of claim 1 , wherein the first carrier gas comprises at least one of helium (He), oxygen gas (O 2 ), and nitrogen (N 2 ).
7. The method of claim 6 , wherein the second carrier gas comprises at least one of helium (He), oxygen gas (O 2 ), and nitrogen (N 2 ).
8. The method of claim 7 , wherein the third carrier gas comprises at least one of helium (He), oxygen gas (O 2 ), and nitrogen (N 2 ).
9. The method of claim 1 , wherein
the first precursor is mixed with a third carrier gas in a third ratio of carrier gas to precursor, and the first ratio is greater than the third ratio.
10. The method of claim 1 , wherein the discharge gas comprises oxygen.
11. A method for forming a semiconductor structure, comprising:
forming a gate dielectric layer over a substrate;
forming a polysilicon layer over the gate dielectric layer;
etching at least one first portion of the polysilicon layer with at least one first precursor, thereby defining at least one gate pattern, the first precursor mixed with a first carrier gas in a first ratio of carrier gas to precursor;
etching at least one second portion of the gate dielectric layer with at least one second precursor, the second precursor mixed with a second carrier gas in a second ratio of carrier gas to precursor, the second ratio greater than the first ratio;
removing charges of the gate pattern with at least one discharge gas, and
etching at least one third portion of the gate dielectric layer with at least one third precursor after removing the charges, the third precursor mixed with a third carrier gas in a third ratio of carrier gas to precursor, the second ratio greater than the second ratio wherein:
the first, second, and third precursors each comprise at least one of chlorine gas (Cl 2 ), hydrogen bromide (HBr) and carbon fluoride (CF 4 ) and at least one of helium (He), oxygen gas (O 2 ) and nitrogen gas (N 2 ),
the discharge gas comprises at least one of helium (He), oxygen gas (O 2 ), argon (Ar) and nitrogen (N 2 ), and
the first, second and third carrier gases each comprise at least one of helium (He), oxygen gas (O 2 ), and nitrogen (N 2 ).
12. The method of claim 11 , wherein the discharge gas comprises oxygen.
13. A method for forming a semiconductor structure, comprising:
forming a gate dielectric layer over a substrate;
forming a polysilicon layer over the gate dielectric layer;
etching at least one first portion of the polysilicon layer with at least one first precursor, thereby defining at least one gate pattern;
etching at least one second portion of the gate dielectric layer with at least one second precursor; and
removing charges of the gate pattern with at least one discharge gas comprising oxygen.
14. The method of claim 13 , wherein
the second precursor is mixed with a first carrier gas in a first ratio of carrier gas to precursor; and the method further comprises
etching at least one third portion of the gate dielectric layer with at least one third precursor, the third precursor mixed with a second carrier gas in a second ratio of carrier gas to precursor, the second ratio greater than the first ratio.