Optoelectronic component comprising a diffraction grating with a transverse structure
View Patent ↗The field of the invention is that of optoelectronic components with a buried stripe structure. The optoelectronic device according to the invention is a stripe structure, comprising at least one buried waveguide and a layer called a grating layer in the form of an elongate stripe comprising features, each feature having an approximately rectangular shape, the length of the feature being substantially perpendicular to the direction of the length of the stripe of the grating layer, the layer being placed so as to provide optical coupling with an optical wave propagating in the waveguide, the length of certain features being substantially less than the width of the waveguide.
1. An optoelectronic device comprising: a buried waveguide in the form of an elongate stripe and grating layer in the form of an elongate stripe having features, each feature having an approximately rectangular shape, the length of the features being substantially perpendicular to the length direction of the grating layer, said layer being placed so as to provide optical coupling with an optical wave propagating in the waveguide, wherein the length of certain features is substantially less than the width of the waveguide, the grating layer comprising at least two rows of features, the axes of said rows being parallel to the central axis of the grating layer.
2. The optoelectronic device according to claim 1 , wherein the features are recesses produced within the grating layer.
3. The optoelectronic device according to claim 1 , wherein the features are recesses produced on the periphery of the grating layer, the layer thus having indentations.
4. The optoelectronic device according to claim 1 , wherein the features are of variable size.
5. The optoelectronic device according to claim 1 , wherein the features are placed symmetrically with respect to the central axis of the grating layer.
6. The optoelectronic device according to claim 1 , wherein the features are placed asymmetrically with respect to the central axis of the grating layer.
7. The optoelectronic device according to claim 1 , wherein the grating layer comprises at least three rows of features, the axes of said rows being parallel to the central axis of the grating layer.
8. The optoelectronic device according to claim 1 , wherein the features of all the rows are of identical shape.
9. The optoelectronic device according to claim 1 , wherein the pitch separating two consecutive features is constant in each row.
10. The optoelectronic device according to claim 9 , wherein the pitch separating two consecutive features of a first row is different from the pitch separating two consecutive features of a second row.
11. A process for producing a device in bridge ridge stripe (BRS) technology, according to claim 1 , which includes a substrate, comprising at least the following three steps:
deposition of the waveguide layer on the substrate, deposition of the grating layer and then etching of the grating;
exclusive protection of the grating region and continuation of the etching of the waveguide down to the substrate; and
epitaxial regrowth so as to bury the waveguide and the grating.