Carrying mechanism, a carrying device and a vacuum processing apparatus
View Patent ↗A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second parallelogram linkages. The second parallelogram linkage is formed by using a link of the first parallelogram linkage, has four sides with an equal length, and is linearly extended or retracted along a linear guide. Links of the first parallelogram linkage and links of the second parallelogram linkage are configured to rotate while being in a restrained state of 90° at pivots of both ends of the common link of the first and second parallelogram linkage, respectively. An arm is provided at a pivot of an end of a link opposed to the link of the first parallelogram linkage such that the arm rotates in a restrained state of 90° relative to the link.
1. A carrying mechanism, comprising:
a first parallelogram link mechanism; and
a second parallelogram link mechanism formed by using a given link of the first parallelogram link mechanism, the second parallelogram link mechanism having four sides with an equal length and being extendable and retractable linearly in a predetermined direction, wherein
a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in a state such that the first and second restrained links are restrained at a given angle at one end of a common link shared between the first and second parallelogram link mechanisms, and a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in a state such that the first and second restrained links are restrained at a given angle at the other end of the common link shared between the first and second parallelogram link mechanisms, and
the carrying mechanism comprises a carrying arm member configured such that the carrying arm member rotates in such a state that the carrying arm member is restrained at a given angle relative to an opposed link opposed to the common link in the first parallelogram link mechanism, at a pivot of a given end of the opposed link.
2. The carrying mechanism according to claim 1 , wherein the length of the first restrained link is equal to that of the carrying arm member.
3. The carrying mechanism according to claim 1 , wherein an angle formed by the first restrained link and the second restrained link is an angle other than 90°.
4. The carrying mechanism according to claim 1 , which comprises a third parallelogram link mechanism, the third parallelogram link mechanism being formed by using the first restrained link and having a first arm member and a second arm member, the first arm member and the second arm member being configured to rotate around pivots of both ends of the first restrained link in such a state that the first arm member is restrained at a given angle relative to the common link and that the second arm member is restrained at a given angle relative to the opposed link.
5. A carrying mechanism, comprising:
a first link mechanism formed by a parallelogram link mechanism; and
a second link mechanism having a common link and a second restrained link, the common link being common with a given link of the first link mechanism, and the second restrained link being equal to the common link in length and being configured to rotate in a state that the second restrained link is restrained together with a first restrained link of the first link mechanism at a given angle at one end of the common link,
wherein the carrying mechanism comprises a carrying arm member configured to rotate in a state that the carrying arm member is restrained at a given angle relative to an opposed link opposed to the common link in the first link mechanism, at a pivot of a given end of the opposed link.
6. A carrying device comprising a carrying mechanism, a parallel link type arm mechanism, and a carrying portion,
the carrying mechanism comprising a first parallelogram link mechanism, and a second parallelogram link mechanism formed by using a given link of the first parallelogram link mechanism, the second parallelogram link mechanism having four sides with an equal length and being extendable and retractable linearly in a predetermined direction, wherein a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in the state such that the first and second restrained links are restrained at a given angle at one end of a common link shared between the first and second parallelogram link mechanisms, and a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in a state such that the first and second restrained links are restrained at a given angle at the other end of the common link shared between the first and second parallelogram link mechanisms, and the carrying mechanism comprises a carrying arm member configured such that the carrying arm member rotates in a state such that the carrying arm member is restrained at a given angle relative to an opposed link opposed to the common link in the first parallelogram link mechanism, at a pivot of a given end of the opposed link,
the parallel link type arm mechanism being formed by using the carrying arm member, and
the carrying portion being driven by the parallel link type arm mechanism and supporting an object to be carried.
7. A vacuum processing apparatus with a plurality of processing chambers connected to a vacuum exhaust system,
the vacuum processing apparatus comprising a carrying chamber and a vacuum processing chamber,
the carrying chamber being equipped with a carrying device, the carrying device comprising a first parallelogram link mechanism, and a second parallelogram link mechanism formed by using a given link of the first parallelogram link mechanism, the second parallelogram link mechanism having four sides with an equal length and being extendable and retractable linearly in a predetermined direction,
wherein a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in a state such that the first and second restrained links are restrained at a given angle at one end of a common link shared between the first and second parallelogram link mechanisms, and a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in a state such that the first and second restrained links are restrained at a given angle at the other end of the common link shared between the first and second parallelogram link mechanisms and the carrying mechanism comprises a carrying arm member configured such that the carrying arm member rotates in a state such that the carrying arm member is restrained at a given angle relative to an opposed link opposed to the common link in the first parallelogram link mechanism, at a pivot of a given end of the opposed link,
the parallel link type arm mechanism being formed by using the carrying arm member,
the carrying portion being adapted to be driven by the parallel link type arm mechanism and to support an object to be carried, and
the vacuum processing chamber being communicated with the carrying chamber and configured to receive and deliver the object by using the carrying device.
8. A carrying mechanism, comprising:
a first parallelogram link mechanism, and
a second parallelogram link mechanism formed by using a given link of the first parallelogram link mechanism, the second parallelogram link mechanism having four sides with an equal length and being extendible and retractable linearly in a predetermined direction, wherein
a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in a state such that the first and second restrained links are restrained at 90 degrees, at one end of a common link shared between the first and second parallelogram link mechanisms, and a first restrained link constituting the first parallelogram link mechanism and a second restrained link constituting the second parallelogram link mechanism are configured to rotate in a state such that the first and second restrained links are restrained at 90 degrees, at the other end of the common link shared between the first and second parallelogram link mechanisms, and
the carrying mechanism comprises a carrying arm member configured such that the carrying arm member rotates in a state such that the carrying arm member is restrained at 90 degrees relative to an opposed link opposed to the common link in the first parallelogram link mechanism, at a pivot of a given end of the opposed link.
9. A carrying device comprising a carrying mechanism, a parallel link type arm mechanism, and a carrying portion,
the carrying mechanism comprising a first link mechanism formed by a parallelogram link mechanism, and a second link mechanism comprising a common link and a second restrained link, the common link being common with a given link of the first link mechanism, and the second restrained link being equal to the common link in length and being configured to rotate in a state such that the second restrained link is restrained together with a first restrained link of the first link mechanism at a given angle at one end of the common link,
wherein the carrying mechanism comprises a carrying arm member configured to rotate in a state such that the carrying arm member is restrained at a given angle relative to an opposed link opposed to the common link in the first link mechanism, at a pivot of a given end of the opposed link,
the parallel link type arm mechanism being formed by using the carrying arm member, and
the carrying portion being driven by the parallel link type arm mechanism and supporting an object to be carried.
10. A vacuum processing apparatus with a plurality of processing chambers connected to a vacuum exhaust system,
the vacuum processing apparatus comprising a carrying chamber and a vacuum processing chamber,
the carrying chamber being equipped with a carrying device, the carrying device comprising a first link mechanism formed by a parallelogram link mechanism, and a second link mechanism comprising a common link and a second restrained link, the common link being common with a given link of the first link mechanism, and the second restrained link being equal to the common link length and being configured to rotate in a state such that the second restrained link is restrained together with a first restrained link of the first link mechanism at a given angle at one end of the common link,
wherein the carrying mechanism comprises a carrying arm member configured to rotate in a state such that the carrying arm member is restrained at a given angle relative to an opposed link opposed to the common link in the first link mechanism, at a pivot of a given end of the opposed link,
the parallel link type arm mechanism being formed by using the carrying arm member,
the carrying portion being adapted to be driven by the parallel link type arm mechanism and to support an object to be carried, and
the vacuum processing chamber being communicated with the carrying chamber and configured to receive and deliver the object by using the carrying device.