Microelectronic package and method of cooling same
A microelectronic package comprises a chip stack ( 110 ) that includes a substrate ( 111 ), a first die ( 112 ) over the substrate and a second die ( 113 ) over the first die, a first underfill layer ( 114 ) between the substrate and the first die, and a second underfill layer ( 115 ) between the first die and the second die. The microelectronic package further comprises a fluidic microchannel system ( 120 ) in the chip stack, and the fluidic microchannel system comprises a fluid inlet ( 121 ) and a fluid outlet ( 122 ) connected to each other by a fluidic passage ( 123 ).
1. A microelectronic package comprising:
a chip stack that includes:
a substrate;
a first die over the substrate and a second die over the first die;
a first underfill layer between the substrate and the first die; and
a second underfill layer between the first die and the second die;
a first fluidic microchannel system in the chip stack, the first fluidic microchannel system comprising a first fluid inlet and a first fluid outlet connected to each other by a first fluidic passage; and
a second fluidic microchannel system in the chip stack, the second fluidic microchannel system comprising a second fluid inlet and a second fluid outlet connected to each other by a second fluidic passage, wherein the first fluidic passage is entirely contained within the substrate and the first fluid inlet and the first fluid outlet are both located at a first side of the substrate, and wherein the second fluidic passage extends through the substrate, the first underfill layer, and the first die and into the second underfill layer.
2. The microelectronic package of claim 1 wherein:
the second fluidic passage comprises:
a fluidic channel in the second underfill layer, and
a first fluidic via and a second fluidic via fluidly connected to the fluidic channel; and
the fluidic microchannel system further comprises a first gasket in the first underfill layer and a second gasket in the second underfihl layer.
3. The microelectronic package of claim 2 further comprising:
an integrated heat spreader over the second die; and
a first thermal interface material between the second die and the integrated heat spreader.
4. The microelectronic package of claim 3 further comprising:
a heatsink over the integrated heat spreader; and
a second thermal interface material between the integrated heat spreader and the heatsink.
5. The microelectronic package of claim 1 wherein:
the first fluid inlet is surrounded by a first gasket and the first fluid outlet is surrounded by a second gasket.
6. The microelectronic package of claim 5 wherein:
at least one of the first gasket and the second gasket is made of one of a solder material, an elastomer material, and a curable material.
7. The microelectronic package of claim 6 wherein:
the first die comprises a hot spot; and
at least one of the first fluidic microchannel system and the second fluidic microchannel system is located adjacent to the hot spot.