Ultrasonic probe, backing material for ultrasonic probe, and method of manufacturing the same
A backing material that is advantageous in insulation property and can realize a desired acoustic impedance without making the cross-linking and curing reaction of elastomer or resin as a parent material unstable. The backing material is provided on a backside of vibrators for transmitting and/or receiving ultrasonic waves in an ultrasonic probe, and the backing material includes: a parent material containing elastomer or resin and having an insulation property; and composite powder dispersed to fill the parent material, and the composite powder includes powder of a material having a larger acoustic impedance than that of the parent material and an insulation coating for covering a surface of the powder, and the insulation coating contains an oxide of an element of group XIII to group XV except for carbon (C), nitrogen (N), phosphorus (P).
1. A backing material provided on a backside of vibrators for transmitting and/or receiving ultrasonic waves in an ultrasonic probe, said backing material comprising:
a parent material containing one of elastomer and resin and having an insulation property; and
composite powder dispersed to fill said parent material, said composite powder including powder of a material having a larger acoustic impedance than that of said parent material and an insulation coating for covering a surface of said powder, said insulation coating containing an oxide of an element of group XIII to group XV except for carbon (C), nitrogen (N), phosphorus (P).
2. The backing material according to claim 1 , wherein said powder is an inorganic material containing a transition metal element.
3. The backing material according to claim 1 , wherein said insulation coating contains one of silicon oxide (SiO 2 ) and aluminum oxide (Al 2 O 3 ).
4. The backing material according to claim 1 , wherein said insulation coating has a thickness of not less than 0.1 μm.
5. An ultrasonic probe comprising:
vibrators for transmitting and/or receiving ultrasonic waves; and
a backing material provided on a backside of said vibrators, said backing material including a parent material containing one of elastomer and resin and having an insulation property, and composite powder dispersed to fill said parent material, said composite powder including powder of a material having a larger acoustic impedance than that of said parent material and an insulation coating for covering a surface of said powder, said insulation coating containing an oxide of an element of group XIII to group XV except for carbon (C), nitrogen (N), phosphorus (P).
6. The ultrasonic probe according to claim 5 , wherein said powder is an inorganic material containing a transition metal element.
7. The ultrasonic probe according to claim 5 , wherein said insulation coating contains one of silicon oxide (SiO 2 ) and aluminum oxide (Al 2 O 3 ).
8. The ultrasonic probe according to claim 5 , wherein said insulation coating has a thickness of not less than 0.1 μm.
9. A method of manufacturing a backing material provided on a backside of vibrators for transmitting and/or receiving ultrasonic waves in an ultrasonic probe, said method comprising the steps of:
preparing a parent material containing one of elastomer and resin and having an insulation property;
adding an alkoxide of an element of group XIII to group XV except for carbon (C), nitrogen (N), phosphorus (P) and powder of a material having a larger acoustic impedance than that of said parent material into anhydrous alcohol and stirring them to make a mixture liquid;
adding alcohol and water into said mixture liquid for hydrolysis of the alkoxide in said mixture liquid and heating said mixture liquid for evaporation of the alcohol and water to form an insulation coating containing an oxide of an element of group XIII to group XV except for carbon (C), nitrogen (N), phosphorus (P) on a surface of said powder so as to make composite powder; and
dispersing said composite powder to fill said parent material and curing said parent material with a curing agent.