Lithographic apparatus and method
According to an aspect of the present invention, there is provided a lithographic apparatus that includes a substrate carrier arranged to hold a substrate in position using an electrostatic force. The substrate carrier is provided with an integral power source. The apparatus also includes a substrate table for holding the substrate carrier.
1. A lithographic apparatus comprising:
a substrate carrier arranged to hold a substrate in position using an electrostatic force, the substrate carrier comprises a first layer of material and a second layer of material that is electrically insulated from the first layer of material, the substrate carrier being provided with an integral power source configured to provide a potential difference between the first layer of material and the second layer of material; and
a substrate table for holding the substrate carrier.
2. A lithographic apparatus as claimed in claim 1 , wherein the integral power source is a battery.
3. A lithographic apparatus as claimed in claim 2 , wherein the integral power source is a polymer battery.
4. A lithographic apparatus as claimed in claim 2 , further comprising a charging apparatus arranged to charge the battery.
5. A lithographic apparatus as claimed in claim 4 , wherein the charging apparatus is an induction coil.
6. A lithographic apparatus as claimed in claim 1 , wherein the substrate carrier is substantially the same thickness as the substrate.
7. A lithographic apparatus as claimed in claim 1 , wherein the substrate carrier is thinner than the substrate.
8. A lithographic apparatus as claimed in claim 1 , wherein the substrate table is arranged to hold the substrate carrier using a vacuum.
9. A lithographic apparatus as claimed in claim 1 , wherein the substrate carrier is provided with a planar surface with an array of protrusions protruding therefrom.
10. A lithographic apparatus as claimed in claim 1 , wherein the substrate carrier is arranged to hold irregularly sized substrates.
11. A lithographic apparatus as claimed in claim 1 , wherein the integral power source is movable simultaneously with the substrate carrier.
12. A lithographic apparatus as claimed in claim 1 , wherein the first layer of material comprises a metal, and wherein the second layer of material comprises a diamond-like carbon.
13. A lithographic apparatus as claimed in claim 12 , wherein the substrate carrier comprises a plurality of protrusions configured to support the substrate, and wherein the second layer of material covers the plurality of protrusions.
14. A substrate carrier arranged to hold a substrate in position using an electrostatic force, the substrate carrier comprising a first layer of material and a second layer of material that is electrically insulated from the first layer of material, wherein the substrate carrier is provided with an integral power source configured to provide a potential difference between the first layer of material and the second layer of material.
15. A substrate carrier as claimed in claim 14 , wherein the integral power source is a battery.
16. A substrate carrier as claimed in claim 15 , wherein the battery is a polymer battery.
17. A substrate carrier as claimed in claim 14 , wherein the integral power source is configured to be simultaneously movable with the substrate carrier.
18. A substrate carrier as claimed in claim 14 , wherein the first layer of material comprises a metal, and wherein the second layer of material comprises a diamond-like carbon.
19. A substrate carrier as claimed in claim 18 , further comprising a plurality of protrusions configured to support the substrate, wherein the second layer of material covers the plurality of protrusions.