Method for producing ink jet recording head
A producing method for a liquid discharge head having a pressure generation chamber communicating with a discharge port for discharging a liquid, a piezoelectric element provided corresponding to the pressure generation chamber, and a vibration plate provided between the pressure generation chamber and the piezoelectric element, the method including: a preparation step of preparing a flat plate-shaped substrate having a recess on a main surface thereof, a piezoelectric element forming step of forming the piezoelectric element in the recess, a vibration plate forming step of forming the flat vibration plate on the main surface of the substrate and the piezoelectric element, a pressure generation chamber forming step of forming the pressure generation chamber on the vibration plate, and a removing step of removing the substrate in at least a peripheral portion of the piezoelectric element.
1. A producing method for an ink jet recording head including pressure generation chambers respectively communicating with discharge ports for discharging liquid, piezoelectric elements respectively provided corresponding to the pressure generation chambers, and a vibration plate commonly provided between the pressure generation chambers and the piezoelectric elements, the method comprising:
a providing step of providing a flat-shaped substrate;
a recess forming step of forming recesses in a main surface of the substrate by etching the main surface of the substrate;
a piezoelectric element forming step of forming the piezoelectric elements in the recesses, by depositing successive layers in the recesses so as to form the main surface of the substrate and the piezoelectric elements to be flat;
a vibration plate forming step of forming the vibration plate on the main surface of the substrate and the piezoelectric elements so as to form the vibration plate to be flat;
a pressure generation chamber forming step of forming the pressure generation chambers on the vibration plate; and
a removing step of removing portions of the substrate in peripheral portions of the piezoelectric elements to form spaces surrounding the piezoelectric elements in the substrate.
2. A producing method for an ink jet recording head according to claim 1 , further comprising, between the providing step and the piezoelectric element forming step:
a step of forming a sacrifice layer, capable of being selectively etched, in the recesses; and
a step of forming a passivation layer, having an etching resistance, at least on the sacrifice layer.
3. A producing method for an ink jet recording head according to claim 2 , further comprising:
a step of removing a part of the substrate and a part of the passivation layer thereby forming, in the substrate, a liquid supply aperture communicating with the pressure generation chambers.
4. A producing method for an ink jet recording head according to claim 1 , wherein the pressure generation chamber forming step includes:
a step of forming a first pattern corresponding to the pressure generation chambers;
a step of forming, on the first pattern, a second pattern for constituting wall members of the pressure generation chambers; and
a step of removing the first pattern, thereby forming the pressure generation chambers.
5. A producing method for an ink jet recording head according to claim 4 , wherein the step of removing the first pattern thereby forming the pressure generation chambers is executed after the removing step.
6. A producing method for an ink jet recording head according to claim 1 , wherein the substrate is constituted of silicon with a surface orientation {110}.
7. A producing method for an ink jet recording head according to claim 1 , wherein the removing step is executed by a crystal axis anisotropic etching.