Method for forming pattern, thin film transistor, display device, method for manufacturing thereof, and television apparatus
View Patent ↗To provide a display device which can be manufactured with higher efficiency in the use of material through a simplified manufacturing process, and a method for manufacturing the display device. Another object is to provide a technique by which patterns of a wiring the like which constitutes the display device can be formed to a desired shape with good control. In a method for forming a pattern according to the present invention, a mask is formed over a light-transmitting substrate; a first region including a photocatalyst is formed over the substrate and the mask; the photocatalyst is irradiated with light through the substrate to modify a part of the first region; a second region is formed; and a composition containing a pattern forming material is discharged to the second region, thus, a pattern is formed. The mask does not transmit light.
1. A method for forming a pattern, comprising the steps of:
forming a mask over a light-transmitting substrate;
forming a first region including a photocatalyst over the light-transmitting substrate and the mask;
forming a material containing a fluorocarbon chain over the photocatalyst;
irradiating the photocatalyst and the material containing the fluorocarbon chain with light through the light-transmitting substrate to modify a part of a surface of the material containing the fluorocarbon chain which is to be a second region; and
discharging a conductive composition containing a pattern forming material to the second region to form a pattern,
wherein the mask does not transmit the light.
2. A method according to claim 1 , wherein titanium oxide is used as the photocatalyst to form the first region.
3. A method according to claim 1 , wherein a surface of the material containing the fluorocarbon chain is modified so that the second region has higher wettability with the composition than the first region.
4. A method for manufacturing a thin film transistor, comprising the steps of:
forming a first conductive layer over a light-transmitting substrate;
forming an insulating layer over the light-transmitting substrate and the first conductive layer;
forming a first region including a photocatalyst over the insulating layer;
forming a material containing a fluorocarbon chain over the photocatalyst;
irradiating the photocatalyst and the material containing the fluorocarbon chain with light through the light-transmitting substrate to modify a part of a surface of the material containing the fluorocarbon chain which is to be a second region; and
discharging a composition containing a conductive material to the second region to form a second conductive layer,
wherein the first conductive layer does not transmit light.
5. A method according to claim 4 , wherein titanium oxide is used as the photocatalyst to form the first region.
6. A method according to claim 4 , wherein a surface of the material containing the fluorocarbon chain is modified so that the second region has higher wettability with the composition than the first region.
7. A method according to claim 4 , wherein the first conductive layer is formed as a gate electrode layer and the second conductive layer is formed as a source electrode layer and a drain electrode layer.
8. A method for forming a pattern, comprising the steps of:
forming a mask over a light-transmitting substrate;
forming a first region including a photocatalyst over the light-transmitting substrate and the mask;
forming a material containing a fluorocarbon chain over the photocatalyst;
irradiating the photocatalyst and the material containing the fluorocarbon chain with light through the light-transmitting substrate to modify a part of a surface of the material containing the fluorocarbon chain which is to be a second region;
discharging a conductive composition containing a pattern forming material to the second region to form a pattern; and
removing a part of the first region including the photocatalyst and a part of the material containing the fluorocarbon chain,
wherein the mask does not transmit the light.
9. A method according to claim 8 , wherein titanium oxide is used as the photocatalyst to form the first region.
10. A method according to claim 8 , wherein a surface of the material containing the fluorocarbon chain is modified so that the second region has higher wettability with the composition than the first region.
11. A method for manufacturing a thin film transistor, comprising the steps of:
forming a first conductive layer over a light-transmitting substrate;
forming an insulating layer over the light-transmitting substrate and the first conductive layer;
forming a first region including a photocatalyst over the insulating layer;
forming a material containing a fluorocarbon chain over the photocatalyst;
irradiating the photocatalyst and the material containing the fluorocarbon chain with light through the light-transmitting substrate to modify a part of a surface of the material containing the fluorocarbon chain which is to be a second region;
discharging a composition containing a conductive material to the second region to form a second conductive layer; and
removing a part of the first region including the photocatalyst and a part of the material containing the fluorocarbon chain,
wherein the first conductive layer does not transmit light.
12. A method according to claim 11 , wherein titanium oxide is used as the photocatalyst to form the first region.
13. A method according to claim 11 , wherein a surface of the material containing the fluorocarbon chain is modified so that the second region has higher wettability with the composition than the first region.
14. A method according to claim 11 , wherein the first conductive layer is formed as a gate electrode layer and the second conductive layer is formed as a source electrode layer and a drain electrode layer.