Carbon nanotube reinforced metal composites
View Patent ↗A carbon nanotube reinforced metal nanocomposite material includes a continuous metal phase, and a plurality of carbon nanotubes dispersed in the continuous metal phase. The metal phase extends throughout substantially an entire thickness of the nanocomposite material. The nanotubes are preferably single wall nanotubes (SWNTs). Carbon nanotube reinforced metal nanocomposites according to the invention provide thermal conductivity and electrical conductivity which are generally significantly higher than the pure metal continuous phase material, mechanical strength is 2 to 3 times greater than that of the pure metal, and a tailorable coefficient of thermal expansion obtainable through changing the percentage of nanotubes in the nanocomposite.
1. A carbon nanotube reinforced metal nanocomposite material, comprising:
a continuous metal phase comprising copper, and
a plurality of carbon nanotubes uniformly covered by and interfacially bonded to said continuous metal phase, wherein said continuous metal phase extends throughout substantially an entire volume of said nanocomposite material, and
further wherein said nanocomposite material provides a 25° C. bulk electrical conductivity that is at least 20% greater than a 25° C. bulk electrical conductivity of said metal.
2. The nanocomposite material of claim 1 , wherein said metal comprises copper and said 25° C. bulk electrical conductivity of said nanocomposite material is at least 40% greater than said 25° C. bulk electrical conductivity of said copper.
3. The nanocomposite material of claim 1 , wherein said plurality of carbon nanotubes comprise at least 95% single wall nanotubes (SWNTS).
4. The nanocomposite material of claim 1 , further comprising a metallic surface having a composition different from said metal, wherein said nanocomposite material is electroplated onto said metallic surface.
5. The nanocomposite material of claim 1 , wherein said nanocomposite material provides coefficient of thermal expansion in the range from 3 to 6×10 −6 /K in the temperature range from 25 to 150° C.
6. The nanocomposite material of claim 1 , wherein a volume fraction of said plurality of carbon nanotubes is from 5 to 30% of said nanocomposite material.
7. The nanocomposite material of claim 1 , wherein said nanocomposite material is a layer having a thickness, wherein said plurality of carbon nanotubes are preferentially aligned in said nanocomposite material in a direction generally orthogonal to a direction of said thickness.
8. The nanocomposite material of claim 1 , wherein said 25° C. bulk electrical conductivity and a bulk thermal conductivity of said nanocomposite material are both isotropic.
9. The nanocomposite material of claim 1 , wherein said nanocomposite material consists of said continuous metal phase and said plurality of carbon nanotubes.
10. An integrated circuit (IC), comprising,
a semiconducting substrate layer, and
at least one interconnect layer comprising a carbon nanotube reinforced metal nanocomposite material on said semiconducting substrate layer, comprising:
a continuous metal phase comprising copper, and
a plurality of carbon nanotubes uniformly covered by and interfacially bonded to said continuous metal phase, wherein said continuous metal phase extends throughout substantially an entire volume of said nanocomposite,
further wherein said nanocomposite material provides a 25° C. bulk electrical conductivity that is at least 20% greater than a 25° C. bulk electrical conductivity of said metal.
11. The IC of claim 10 , wherein said 25° C. bulk electrical conductivity and a bulk thermal conductivity of said nanocomposite material are both isotropic.
12. The IC of claim 10 , wherein said metal comprises copper and said 25° C. bulk electrical conductivity of said nanocomposite material is at 40% greater than said 25° C. bulk electrical conductivity of said metal.
13. The IC of claim 10 , further comprising further comprising a metallic surface having a composition different from said metal, wherein said nanocomposite material is electroplated onto said metallic surface.
14. The IC of claim 10 , wherein said plurality of carbon nanotubes are preferentially aligned in said composite in a direction generally orthogonal to a thickness direction of said interconnect layer.
15. The IC of claim 10 , wherein said interconnect layer is formed inside a damascene structure.
16. The IC of claim 15 , wherein said at least one interconnect layer comprises a first interconnect layer and a second interconnect layer, further comprising an inter-level dielectric layer between said first interconnect layer and said second interconnect layer, wherein said second interconnect layer includes a vertical portion in a thickness direction of said inter-level dielectric layer and a horizontal lateral portion on top of said inter-level dielectric layer.
17. A carbon nanotube reinforced metal nanocomposite material formed by an electro-codeposition process, comprising:
a continuous metal phase comprising copper, and
a plurality of carbon nanotubes uniformly covered by and interfacially bonded to said continuous metal phase, wherein said continuous metal phase extends throughout substantially an entire volume of said nanocomposite,
wherein said nanocomposite material provides a 25° C. bulk electrical conductivity that is at least 20% greater than a 25° C. bulk electrical conductivity of said metal, and
wherein said electrodeposition process includes a power supply connected between an anode and a cathode for codeposition of both said metal and said plurality of carbon nanotubes onto said cathode.
18. The nanocomposite material of claim 17 , wherein said plurality of carbon nanotubes are pretreated with one or more surfactants, and a pH value during said electro-codeposition process is maintained at a level of 2-5.