Tantalum and niobium compounds
The present invention relates to specific, novel tantalum and niobium compounds which can serve as starting materials for the preparation of chemical vapour deposition (CVD) precursors.
1. A compound of the formula (II)
where
M is Nb or Ta,
R 1 and R 2 are each independently optionally substituted C 1 - to C 12 -alkyl, C 5 - to C 12 -cycloalkyl, C 6 - to C 10 -aryl radicals, 1-alkenyl, 2-alkenyl and 3-alkenyl radicals,
Hal is halogen from the group of F, Cl, Br and I, and
L is an organic complex ligand which coordinates to the metal atom via O, S or N.
2. The compound according to claim 1 , wherein Hal is Cl or Br.
3. The compound according to claim 1 , wherein Hal is Cl.
4. The compound according to claim 1 , wherein L are identical or different monodentate or bidentate ligands.
5. The compound according to claim 3 , wherein L are identical or different monodentate or bidentate ligands.
6. The compound according to claim 1 , wherein M is Nb.
7. The compound according to claim 1 , wherein M is Ta.
8. The compound according to claim 5 , wherein M is Nb.
9. The compound according to claim 5 , wherein M is Ta.
10. The compound according to claim 1 , wherein the ligands L are identical and different and are pyridine, picoline, diimine, ether or tetraalkylethylenediamine.
11. The compound according to claim 1 , wherein the ligands L are identical and different and are N,N,N′,N′-tetramethylethylenediamine (TMEDA), N,N,N′,N′-tetramethyl-1,3-propanediamine, N,N′-dialkyl-1,4-diaza-1,3-diene, 2,2′-dipyridyl, dialkyl ether, cyclic ether, ethylene glycol diether, 1-dimethylamino-2-methoxyethane, thioether or tetrahydrothiophene.
12. The compound according to claim 9 , wherein the ligands L are identical and different and are pyridine, picoline, diimine, ether or tetraalkylethylenediamine.
13. The compound according to claim 9 , wherein the ligands L are identical and different and are N,N,N′,N′-tetramethylethylenediamine (TMEDA), N,N,N′,N′-tetramethyl-1,3-propanediamine, N,N′-dialkyl-1,4-diaza-1,3-diene, 2,2′-dipyridyl, dialkyl ether, cyclic ether, ethylene glycol diether, 1-dimethylamino-2-methoxyethane, thioether or tetrahydrothiophene.