Stacked semiconductor device and method of fabrication
A stacked semiconductor device comprises a lower transistor formed on a semiconductor substrate, a lower interlevel insulation film formed on the semiconductor substrate over the lower transistor, an upper transistor formed on the lower interlayer insulation film over the lower transistor, and an upper interlevel insulation film formed on the lower interlevel insulation film over the upper transistor. The stacked semiconductor device further comprises a contact plug connected between a drain or source region of the lower transistor and a source or drain region of the upper transistor, and an extension layer connected to a lateral face of the source or drain region of the upper transistor to enlarge an area of contact between the source or drain region of the upper transistor and a side of the contact plug.
1. A method of fabricating a semiconductor device, the method comprising:
forming a lower transistor on a semiconductor substrate;
forming a lower interlevel insulation film on the semiconductor substrate, the lower interlevel insulation film covering the lower transistor;
forming an upper transistor on the lower interlevel insulation film over the lower transistor, wherein forming the upper transistor comprises;
patterning the lower interlevel insulation film to form an epitaxial contact hole partially exposing the semiconductor substrate;
growing an epitaxial layer having a crystalline structure in the epitaxial contact hole from the exposed semiconductor substrate;
forming an amorphous silicon layer on the lower interlevel insulation film;
converting the amorphous silicon layer into the same crystalline structure as the epitaxial layer to form a body pattern;
forming source and drain regions for the upper transistor in the body pattern; and forming a gate electrode on the body pattern;
forming an upper interlevel insulation film on the lower interlevel insulation film, the upper interlevel insulation film covering the upper transistor;
forming a first contact plug connected to a source or drain region of the upper transistor and penetrating the upper interlevel insulation film; and
forming a second contact plug connected to a drain or source of the lower transistor and penetrating the upper and lower interlevel insulation films and electrically connected to the first contact plug.
2. The method of claim 1 , wherein the first contact plug comprises a doped polysilicon layer.
3. The method of claim 1 , wherein the first contact plug comprises an epitaxial layer grown from the source region or the drain region of the upper transistor.
4. A method of fabricating a semiconductor device, the method comprising:
forming a lower transistor on a semiconductor substrate;
forming a lower interlevel insulation film on the semiconductor substrate, the lower interlevel insulation film covering the lower transistor;
forming an upper transistor on the lower interlevel insulation film over the lower transistor;
forming an upper interlevel insulation film on the lower interlevel insulation film, the upper interlevel insulation film covering the upper transistor;
forming a first contact plug connected to a source or drain region of the upper transistor and penetrating the upper interlevel insulation film; and
forming a second contact plug connected to a drain or source of the lower transistor and penetrating the upper and lower interlevel insulation films and electrically connected to the first contact plug, wherein forming the second contact plug comprises:
patterning the upper and lower interlevel insulation films to form a contact hole that laterally contacts the first contact plug and partially exposes the drain or source region of the lower transistor;
forming silicide layers on sidewalls of the contact hole and on the exposed drain or source region of the lower transistor, the silicide layers contacting the first contact plug; and
filling the contact hole with a metal material to form the second contact plug.
5. The method of claim 4 , wherein forming the second contact plug further comprises:
forming a barrier metal film in the contact hole.
6. A method of fabricating a semiconductor device, the method comprising:
forming a lower transistor on a semiconductor substrate;
forming a lower interlevel insulation film on the semiconductor substrate, the lower interlevel insulation film covering the lower transistor;
forming an upper transistor on the lower interlevel insulation film over the lower transistor, wherein forming the upper transistor comprises;
patterning the lower interlevel insulation film to form an epitaxial contact hole partially exposing the semiconductor substrate;
growing an epitaxial layer having a crystalline structure in the epitaxial contact hole from the exposed semiconductor substrate;
forming an amorphous silicon layer on the lower interlevel insulation film;
converting the amorphous silicon layer into the same crystalline structure as the epitaxial layer to form a body pattern;
forming source and drain regions for the upper transistor in the body pattern; and forming a gate electrode on the body pattern;
forming an upper interlevel insulation film on the lower interlevel insulation film, the upper interlevel insulation film covering the upper transistor;
forming an interconnection contact hole penetrating the upper interlevel insulation film, a source or drain region of the upper transistor, and the lower interlevel insulation film, and partially exposing a drain or source region of the lower transistor;
forming spacers on sidewalls of the interconnection contact hole;
converting the spacers into silicide layers; and
forming an interconnection contact plug in the interconnection contact hole.
7. The method of claim 6 , wherein the spacers comprise polysilicon layers.
8. The method of claim 6 , wherein forming the interconnection contact plug further comprises forming a barrier metal film in the interconnection contact hole.
9. The method of claim 6 , wherein the interconnection contact plug is formed by depositing copper, aluminum, or tungsten in the interconnection contact hole.