High temperature anneal with improved substrate support
A method including removing an impurity from a gas stream to a processing chamber at a point of use. An apparatus with a point of use purifier on a gas stream. An apparatus including a shelf having dimensions suitable for placement within a thermal processing including a body of a material that renders the body opaque to radiation frequency range used for a temperature measurement of a substrate in a thermal processing chamber.
1. An apparatus comprising:
a thermal processing chamber having dimensions suitable for accommodating a substrate;
at least one source gas coupled to the chamber; and
a purifier coupled to the at least one source gas at a location adjacent to an inlet to the chamber, wherein the purifier is capable of removing at least one of oxygen and water from a stream of the source gas at a process flow rate, wherein the at least one source gas comprises hydrogen.