Using a simultaneously tilting and moving bonding apparatus
An electronic component mounting device according to the invention includes a bonding head for holding and pressure bonding an electronic component to a mounting substrate, a local stage provided with a support surface formed in an area which is almost equal to or slightly larger than that of a mounting surface of the electronic component and serving to support a pressure bonding force from an antimounting surface of the mounting substrate through the support surface, a length measuring mechanism for measuring a distance between the bonding head and the mounting substrate, thereby calculating a virtual plane in a predetermined mounting position on the mounting substrate, and a tilting and moving mechanism for tilting and moving the bonding head and the local stage, thereby causing a normal of the virtual plane in the mounting position to be coincident with an action line of the pressure bonding force, and the pressure bonding is carried out along the normal.
1. A method of using an electronic device which sequentially mounts a plurality of electronic components to a single stationary mounting substrate, comprising the steps of:
measuring a distance between a bonding head for holding and pressure bonding the electronic components to the mounting substrate and the mounting substrate to calculate a virtual plane in a predetermined mounting position on the mounting substrate,
simultaneously tilting and moving in a point symmetry relationship relative to the stationary mounting substrate both the bonding head and a local stage for supporting a pressure bonding force from an antimounting surface of the mounting substrate to cause a normal of the virtual plane in the mounting stationary position to be coincident with an action line of the pressure bonding force, and
carrying out the pressure bonding along the normal.
2. The method of using the electronic device according to claim 1 , wherein
the step of carrying out the pressure bonding is executed in at least one of a state in which the electronic component is heated through the bonding head and a state in which the mounting substrate is heated through the local stage.
3. The method of using the electronic device according to claim 1 , wherein
a step of filling a resin in a space portion between the mounting substrate and the electronic component mounted on the mounting substrate is executed subsequently to the step of carrying out the pressure bonding in a closed space in which an internal atmosphere is regulated to have a predetermined temperature.
4. The method of using the electronic device according to claim 3 , wherein
an inner part of the closed space is set in a decompressing state.
5. The method of using the electronic device according to claim 1 , wherein the step of carrying out the pressure bonding along the normal further comprises:
pressing a support surface of the local stage into the antimounting surface of the mounting substrate at the mounting position, wherein the support surface has an area that is substantially equal to an area of a mounting surface of the electronic component.
6. The method of using the electronic device according to claim 1 , wherein the step of carrying out the pressure bonding along the normal further comprises:
pressing the bonding head with the electronic component to the mounting substrate at the mounting position in a direction that is coincident with the normal; and
pressing the local stage into the antimounting surface of the mounting substrate at the mounting position in a direction that is coincident with the normal.