Laser irradiation apparatus
Since the size of a plate for issuing gas used for a conventional laser irradiation apparatus is large and the distance between an optical system through which a laser light lastly passes and the plate is not enough, it is difficult to check the state of laser light delivered from the optical system which the laser light lastly passes through. A laser irradiation apparatus includes a laser oscillator, an optical system shaping laser light produced by the laser oscillator, a plate having an opening for issuing a gas, a stage provided below the blower, means for maintaining a constant distance between the blower and the stage above the stage, and means provided between the optical system and the blower for observing the laser light transmitted through the optical system are provided.
1. A laser irradiation apparatus comprising:
a laser oscillator;
an optical system shaping laser light produced by the laser oscillator;
a blower having an opening for supplying a gas;
a stage provided below the blower;
a supporting mechanism maintaining a constant distance between the blower and the stage; and
a unit provided between the optical system and the blower for observing the laser light transmitted through the optical system,
wherein the unit includes a CCD camera,
wherein the optical system includes a lens,
wherein the unit is capable of checking shape of the laser light so that a distance between the lens in which laser light lastly passes through and the CCD camera is substantially the same as a distance between a substrate to be irradiated with the laser light and the lens,
wherein the unit is capable of moving between a first position and a second position,
wherein the unit overlaps with the optical system and the stage in the first position,
wherein the unit does not overlap with the optical system in the second position, and
wherein the unit checks energy and shape of the laser light.
2. A laser irradiation apparatus according to claim 1 , wherein the gas is an inert gas.
3. A laser irradiation apparatus according to claim 1 , wherein the unit includes a power meter and beam profiler.
4. A laser irradiation apparatus according to claim 3 , wherein the first position allows the laser light transmitted through the optical system to be entered to the power meter or the beam profiler.
5. A laser irradiation apparatus comprising:
a laser oscillator;
an optical system shaping laser light produced by the laser oscillator;
a blower having an opening for supplying a gas and a window transparent to the laser light shaped by the optical system;
a stage provided below the blower;
a supporting mechanism maintaining a constant distance between the blower and the stage; and
a unit provided between the optical system and the blower for observing the laser light transmitted through the optical system,
wherein the unit includes a CCD camera,
wherein the optical system includes a lens,
wherein the unit is capable of checking shape of the laser light so that a distance between the lens in which laser light lastly passes through and the CCD camera is substantially the same as a distance between a substrate to be irradiated with the laser light and the lens,
wherein the unit is capable of moving between a first position and a second position,
wherein the unit overlaps with the optical system and the stage in the first position,
wherein the unit does not overlap with the optical system in the second position, and
wherein the unit checks energy and shape of the laser light.
6. A laser irradiation apparatus according to claim 5 , wherein the gas is an inert gas.
7. A laser irradiation apparatus according to claim 5 , wherein the unit includes a power meter and beam profiler.
8. A laser irradiation apparatus according to claim 7 , wherein the first position allows the laser light transmitted through the optical system to be entered to the power meter or the beam profiler.
9. A laser irradiation apparatus comprising:
a laser oscillator;
an optical system shaping laser light produced by the laser oscillator;
a blower having an opening for supplying a gas;
a stage provided below the blower;
a supporting mechanism maintaining a constant distance between the blower and the stage; and
a unit provided between the optical system and the blower for observing a shape or a focal point of the laser light transmitted through the optical system,
wherein the unit includes a CCD camera,
wherein the optical system includes a lens,
wherein the unit is capable of checking shape of the laser light so that a distance between the lens in which laser light lastly passes through and the CCD camera is substantially the same as a distance between a substrate to be irradiated with the laser light and the lens,
wherein the unit is capable of moving between a first position and a second position,
wherein the unit overlaps with the optical system and the stage in the first position,
wherein the unit does not overlap with the optical system in the second position, and
wherein the unit checks energy and shape of the laser light.
10. A laser irradiation apparatus according to claim 9 , wherein the unit for observing the shape or the focal point of the laser light includes a beam profiler.
11. A laser irradiation apparatus according to 10 , wherein the beam profiler includes an ND filter and a CCD camera.
12. A laser irradiation apparatus according to claim 9 , wherein the gas is an inert gas.
13. A laser irradiation apparatus according to claim 9 , wherein the unit includes a power meter and beam profiler.
14. A laser irradiation apparatus according to claim 13 , wherein the first position allows the laser light transmitted through the optical system to be entered to the power meter or the beam profiler.
15. A laser irradiation apparatus comprising:
a laser oscillator;
an optical system shaping laser light produced by the laser oscillator;
a blower having an opening for supplying a gas;
a stage provided below the blower;
a supporting mechanism maintaining a constant distance between the blower and the stage; and
a unit provided between the optical system and the blower for observing energy of the laser light transmitted through the optical system,
wherein the unit includes a CCD camera,
wherein the optical system includes a lens,
wherein the unit is capable of checking shape of the laser light so that a distance between the lens in which laser light lastly passes through and the CCD camera is substantially the same as a distance between a substrate to be irradiated with the laser light and the lens,
wherein the unit is capable of moving between a first position and a second position,
wherein the unit overlaps with the optical system and the stage in the first position,
wherein the unit does not overlap with the optical system in the second position, and
wherein the unit checks energy and shape of the laser light.
16. A laser irradiation apparatus according to claim 15 , wherein the unit for observing the energy of the laser light includes a power meter.
17. A laser irradiation apparatus according to claim 15 , wherein the gas is an inert gas.
18. A laser irradiation apparatus according to claim 15 , wherein the unit includes a power meter and beam profiler.
19. A laser irradiation apparatus according to claim 18 , wherein the first position allows the laser light transmitted through the optical system to be entered to the power meter or the beam profiler.
20. A laser irradiation apparatus comprising:
a laser oscillator;
an optical system shaping laser light produced by the laser oscillator;
a blower having an opening for supplying a gas;
a stage provided below the blower;
a supporting mechanism maintaining a constant distance between the blower and the stage;
a first unit provided between the optical system and the blower for observing a shape or a focal point of the laser light transmitted through the optical system; and
a second unit provided between the optical system and the blower for observing energy of the laser light transmitted through the optical system,
wherein the first unit includes a CCD camera,
wherein the optical system includes a lens,
wherein the first unit is capable of checking shape of the laser light so that a distance between the lens in which laser light lastly passes through and the CCD camera is substantially the same as a distance between a substrate to be irradiated with the laser light and the lens,
wherein the first unit and the second unit are capable of moving between a first position and a second position,
wherein the first unit and the second unit overlap with the optical system and the stage in the first position,
wherein the first and the second unit do not overlap with the optical system in the second position, and
wherein the first unit and the second unit check energy and shape of the laser light.
21. A laser irradiation apparatus according to claim 20 , wherein the first unit for observing the shape or the focal point of the laser light includes a beam profiler.
22. A laser irradiation apparatus according to claim 21 , wherein the beam profiler includes an ND filter and a CCD camera.
23. A laser irradiation apparatus according to claim 20 , wherein the second unit for observing the energy of the laser light includes a power meter.
24. A laser irradiation apparatus according to claim 20 , wherein the gas is an inert gas.
25. A laser irradiation apparatus according to claim 20 ,
wherein the first unit includes a beam profiler, and
wherein the second unit includes a power meter.
26. A laser irradiation apparatus according to claim 25 , wherein the first position allows the laser light transmitted through the optical system to be entered to the power meter or the beam profiler.