IP Library Granted Patent US 7,718,707
Granted Patent B2
US 7,718,707 · App. 11/842,466 · Granted May 18, 2010

Method for preparing nanoparticle thin films

Assignee: Innovalight, Inc.
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Quick Facts
Patent No.
US 7,718,707
App. No.
11/842,466
Granted
May 18, 2010
Kind
B2
Abstract

A set of nanoparticles is disclosed. Each nanoparticle of the set of nanoparticles is comprised of a set of Group IV atoms arranged in a substantially spherical configuration. Each nanoparticle of the set of nanoparticles further having a sphericity of between about 1.0 and about 2.0; a diameter of between about 4 nm and about 100 nm; and a sintering temperature less than a melting temperature of the set of Group IV atoms.

Claims (31)

1. A method for preparing a nanoparticle thin film comprising the steps of:

flowing a Group IV precursor gas through a plasma reactor with an annular channel;

igniting the Group IV precursor gas with an RF signal to form a set of Group IV nanoparticles;

dispersing the set of Group IV nanoparticles in a solvent to form an ink;

depositing the ink on a substrate; and

sintering the set of nanoparticles;

wherein the nanoparticle thin film is formed.

2. The method of claim 1 , wherein each nanoparticle of the set of Group IV nanoparticles has a sphericity of between about 1.0 and about 2.0, and a diameter of between about 4 nm and about 100 nm.

3. The method of claim 1 , wherein the step of flowing a Group IV precursor gas through an annular channel further comprises flowing a dopant gas through the annular channel.

4. The method of claim 1 , wherein the step of sintering the set of nanoparticles comprises using one of a resistive heater and a radiative heater.

5. The method of claim 1 , wherein the substrate is one of a silicon substrate and a polyimide substrate.

6. The method of claim 1 , wherein the step of dispersing the set of Group IV nanoparticles in a solvent to form an ink comprises dispersing the set of Group IV nanoparticles in a substantially oxygen-free environment.

7. The method of claim 1 , wherein the solvent comprises at least one of an organic compound and an organosiloxane compound.

8. The method of claim 7 wherein the organic compound is at least one of an alcohol; an aldehyde, a ketone, a carboxylic acid, an ester, an amine, and a halogenated hydrocarbon.

9. The method of claim 3 , wherein the dopant gas comprises at least one of silane, disilane, germane, digermane, a halide analog, phosphine, arsine, boron diflouride, trimethyl borane, and diborane.

10. A nanoparticle thin film prepared by the method of claim 1 .

11. A method for preparing a nanoparticle thin film comprising the steps of:

flowing a Group IV precursor gas through a plasma reactor with an annular channel, the annular channel defined by an outer tube and an inner tube;

igniting the Group IV precursor gas with an RF signal coupled between an outer electrode tube and an inner electrode tube to form a set of Group IV nanoparticles;

dispersing the set of Group IV nanoparticles in a solvent to form an ink;

depositing the ink on a substrate in a pattern; and

sintering the set of nanoparticles;

wherein the nanoparticle thin film is formed.

12. The method of claim 11 , wherein each nanoparticle of the set of Group IV nanoparticles has a sphericity of between about 1.0 and about 2.0 and a diameter of between about 4 nm and about 100 nm.

13. The method of claim 11 , wherein the step of flowing a Group IV precursor gas through an annular channel further comprises flowing a dopant gas through the annular channel.

14. The method of claim 11 , wherein the step of sintering the set of nanoparticles comprises using one of a resistive heater and a radiative heater.

15. The method of claim 11 , wherein the substrate is one of a silicon substrate and a polyimide substrate.

16. The method of claim 11 , wherein the step of dispersing the set of Group IV nanoparticles in a solvent to form an ink comprises dispersing the set of Group IV nanoparticles in a substantially oxygen-free environment.

17. The method of claim 11 , wherein the solvent comprises at least one of an organic compound and an organosiloxane compound.

18. The method of claim 17 wherein the organic compound is at least one of an alcohol, an aldehyde, a ketone, a carboxylic acid, an ester, an amine, and a halogenated hydrocarbon.

19. The method of claim 11 , wherein the step of depositing the ink on a substrate comprises depositing the ink with an inkjet printer.

Assignments (2)
SECURITY AGREEMENT Recorded Aug 22, 2008
From: INNOVALIGHT, INC.
To: SILICON VALLEY BANK; LEADER LENDING, LLC - SERIES A; LEADER LENDING, LLC - SERIES B
Reel/Frame 021428/0560 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2008
From: KELMAN, MAXIM; LI, XUEGENG; YU, PINGRONG; VANHEUSDEN, KAREL; JURBERGS, DAVID
To: INNOVALIGHT, INC.
Reel/Frame 020349/0825 →
Continuity (3)
Provisional Application 6087632800 · Dec 21, 2006
Provisional Application 6090176800 · Feb 16, 2007
Related Publication 20080152938A1 · Jun 26, 2008