Micro-electromechanical device
A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.
1. A micro-electromechanical device, comprising:
a first piezoelectric actuator including a first beam and a second beam, the second beam extending parallel to the first beam, a first fixed end positioned at an end of the first beam, a first connecting end positioned at another end of the first beam, a first working end positioned at an end of the second beam opposite to the first connecting end where another end of the second beam is located, the first fixed end fixed on a substrate; and
a second piezoelectric actuator including a third beam spaced from the first beam and a fourth beam extending parallel to the third beam, a second fixed end positioned at an end of the third beam, a second connecting end positioned at another end of the third beam, a second working end positioned at an end of the fourth beam opposite to the second connecting end where another end of the fourth beam is located, the second fixed end fixed on the substrate, the second working end facing the first working end in a perpendicular direction to a surface of the substrate and separated from the first working end, wherein
the first beam includes a first bottom electrode, a first bottom piezoelectric film on the first bottom electrode, a first intermediate electrode on the first bottom piezoelectric film, a first top piezoelectric film on the first intermediate electrode, and a first top electrode on the first top piezoelectric film;
the second beam includes a second bottom electrode, a second bottom piezoelectric film on the second bottom electrode, a second intermediate electrode on the second bottom piezoelectric film, a second top piezoelectric film on the second intermediate electrode, and a second top electrode on the second top piezoelectric film;
the third beam includes a third bottom electrode, a third bottom piezoelectric film on the third bottom electrode, a third intermediate electrode on the third bottom piezoelectric film, a third top piezoelectric film on the third intermediate electrode, and a third top electrode on the third top piezoelectric film; and
the fourth beam includes a fourth bottom electrode, a fourth bottom piezoelectric film on the fourth bottom electrode, a fourth intermediate electrode on the fourth bottom piezoelectric film, a fourth top piezoelectric film on the fourth intermediate electrode, and a fourth top electrode on the fourth top piezoelectric film, and wherein, in the first connecting end:
the first and second bottom electrodes are electrically connected to each other;
the first and second intermediate electrodes are electrically isolated from each other; and
the first and second top electrodes are electrically connected to each other; and
in the second connecting end:
the third and fourth bottom electrodes are electrically connected to each other;
the third and fourth intermediate electrodes are electrically isolated from each other; and
the third and fourth top electrodes are electrically connected to each other.
2. The micro-electromechanical device of claim 1 , wherein the first fixed end is located on an opposite side of the second fixed end in a plane parallel to the surface of the substrate with respect to a region in which the first working end faces the second working end.