Vibrating gyrosensor and vibrating element
A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.
1. A vibrating gyrosensor comprising:
a support substrate on which a wiring pattern having a plurality of lands is formed; and
a vibrating element mounted on a surface of the support substrate the vibrating element having a base part having a mounting surface on which a plurality of terminals to be connected to the lands is formed, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part,
wherein,
the vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order, and
a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.
2. The vibrating gyrosensor according to claim 1 , wherein the upper surface of the vibrator part is stepped down from the upper surface of the base part through an inclined part; and the reinforcing part is formed on the upper surface of the base end of the vibrator part along the inclined part.
3. The vibrating gyrosensor according to claim 1 , wherein the reinforcing part is formed so that the width of the base end of the vibrator part gradually increases toward the side of the base part.
4. The vibrating gyrosensor according to claim 3 , wherein the reinforcing part is curved at both sides of the base end of the vibrator part.
5. The vibrating gyrosensor according to claim 1 , wherein the edges between the upper surface and the both side surfaces of the vibrator part are melted to form chamfered parts.
6. The vibrating gyrosensor according to claim 1 , wherein at least one of the edges between the upper surface and the side surfaces of the vibrator part is curved.
7. The vibrating gyrosensor according to claim 1 , wherein at least a portion of the surfaces other than the substrate-facing surface of the vibrator part is melted to form a smooth surface.
8. A vibrating gyrosensor comprising:
a support substrate on which a wiring pattern having a plurality of lands is formed; and
a vibrating element mounted on a surface of the support substrate, the vibrating element having a base part having a mounting surface on which a plurality of terminals to be connected to the lands is formed, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part,
wherein,
the vibrator part has a first electrode layer, a piezoelectric layer, a second electrode layer, and an insulating protective layer for sealing the first electrode layer, the piezoelectric layer, and the second electrode layer, which are formed on the substrate-facing surface in that order, and
a reinforcing part is formed at the base end of the vibrator so that the sectional area of the vibrator part gradually increases toward the base part.
9. The vibrating gyrosensor according to claim 8 , wherein the insulating protective layer contains at least a silicon oxide layer.
10. The vibrating gyrosensor according to claim 9 , wherein an adhesive layer is formed on at least the lower side of the silicon oxide layer.
11. The vibrating gyrosensor according to claim 10 , wherein the adhesive layer is an alumina layer.
12. The vibrating gyrosensor according to claim 8 , wherein the insulating protective layer has a thickness of at least 2 times that of the second electrode layer.
13. The vibrating gyrosensor according to claim 8 , wherein the insulating protective layer is wider than the first electrode layer and is formed so that the substrate-facing surface of the vibrator is exposed along the peripheral line of the vibrator part.
14. The vibrating gyrosensor according to claim 8 , wherein a curvature control film is formed on the upper surface of the vibrator part, for controlling the curvature of the vibrator.
15. The vibrating gyrosensor according to claim 14 , wherein the curvature of the vibrator part is within +−5 μm.
16. A vibrating gyrosensor comprising:
a support substrate on which a wiring pattern having a plurality of lands is formed; and
a vibrating element mounted on a surface of the support substrate the vibrating element formed using an undoped single crystal silicon substrate as a base material and includes a base part having a mounting surface on which a plurality of terminals to be connected to the lands is formed, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part,
wherein,
the vibrator has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order, and
a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator gradually increases toward the base part.
17. The vibrating gyrosensor according to claim 16 , wherein the undoped single crystal silicon substrate has a volume resistivity of 100 Ωcm or more.
18. The vibrating gyrosensor according to claim 16 , wherein the surface of the support substrate is covered with a light-shielding cover member.