Microfabricated micro fluid channels

1. A method for fabricating a fluid delivery system, comprising:

attaching a first substrate and a second substrate to form a delivery channel between the first substrate and the second substrate,

wherein the delivery channel provides fluid communication between a first micro-channel and a first well, and the first micro-channel and the first well are both in the first substrate, and

a second micro-channel and a second well are in the first substrate, and the distance between the first and second wells is greater than the distance between the first and second micro-channels.

2. The method of claim 1 , wherein the delivery channel comprises a groove formed on a surface of the second substrate.

3. The method of claim 1 , wherein the delivery channel comprises a groove formed on a surface of the first substrate.

4. The method of claim 1 ,

wherein the first well has a well inlet for receiving fluid,

the first micro-channel has a micro-channel outlet for delivering fluid, and

a cross-sectional area of the well inlet is greater than a cross-sectional area of the micro-channel outlet.

5. The method of claim 4 , wherein the cross sectional area of the well inlet is between one and twenty square millimeters, and the cross sectional area of the micro-channel outlet is between 100 and 10,000 square microns.

6. The method of claim 4 , further comprising forming a hydrophobic surface surrounding the micro-channel outlet.

7. The method of claim 1 , wherein the first substrate has a thickness of at most 500 microns.

8. The method of claim 1 , wherein the first substrate is bonded to the second substrate by spin-on bonding or high temperature bonding.

9. The method of claim 1 , further comprising forming the first micro-channel in the first substrate.

10. The method of claim 9 , wherein the forming comprises etching the first substrate.

11. The method of claim 9 , wherein the first substrate comprises a top surface opposed to a bottom surface;

the method further comprising coating the top surface, the bottom surface and the first micro-channel with a support material.

12. The method of claim 11 , wherein the coating the top surface, the bottom surface and the first micro-channel comprises growing a layer of oxide on the first substrate.

13. The method of claim 11 , wherein the support material comprises a dielectric.

14. The method of claim 11 , further comprising etching the top surface to remove a portion of the first substrate.

15. The method of claim 14 , wherein the etching provides an etched surface opposed to the bottom surface, and

the micro-channel extends both above and below the etched surface.

16. The method of claim 1 , wherein

the first micro-channel comprises a coating comprising a support material, and

the first substrate comprises a top surface opposed to a bottom surface;

the method further comprising etching the top surface to remove a portion of the first substrate.

17. The method of claim 16 , wherein the support material comprises a dielectric.

18. The method of claim 16 , wherein the etching provides an etched surface opposed to the bottom surface, and

the micro-channel extends both above and below the etched surface.

19. The method of claim 1 , further comprising forming the first well in the first substrate.

20. The method of claim 19 , wherein the forming comprises etching the first substrate.

21. The method of claim 1 , wherein the first substrate comprises an outer edge and an inside surface;

the method further comprising forming a plurality of micro-channels at the inside surface, and forming a plurality of wells near the outer edge.

22. The method of claim 1 , wherein the second substrate is on a third substrate, a second delivery channel is formed between the second substrate and the third substrate, and the second substrate comprises an extended channel establishing fluid communication between the second micro-channel and the second delivery channel;

the second delivery channel and the extended channel providing fluid communication between the second micro-channel and the second well.

23. The method of claim 22 , further comprising forming the extended channel in the second substrate.

24. The method of claim 23 , where the forming comprises etching the second substrate.

25. A method for fabricating a fluid delivery system, comprising:

attaching a first substrate and a second substrate to form a delivery channel between the first substrate and the second substrate, and

forming the first micro-channel in the first substrate,

wherein the delivery channel provides fluid communication between a first micro-channel and a first well, and the first micro-channel and the first well are both in the first substrate,

the forming comprises etching the first substrate, and

the etching of the first substrate comprises

etching a top surface of the first substrate to form a first channel, and

etching a bottom surface, opposed to the top surface, to form a second channel;

wherein the first channel is in fluid communication with the second channel.

26. The method of claim 25 , wherein a cross-sectional area of the first channel is less than a cross-sectional area of the second channel.